POCl3 diffusion with in-situ SiO2 barrier for selective emitter multicrystalline solar grade silicon solar cells
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SINKE, W., ed. and others. The compiled state-of-the-art of PV solar technology and deployment : 24th European Photovoltaic Solar Energy Conference and Exhibition. Munich, Germany: WIP-Renewable Energies, 2009, pp. 1835-1838. ISBN 3-936338-25-6. Available under: doi: 10.4229/24thEUPVSEC2009-2CV.5.35
Zusammenfassung
We present an innovative process for the formation of a selective emitter by using an advanced phosphorous glass as a barrier layer against subsequent diffusion. The advanced barrier glass was achieved by the formation of a standard phosphorous glass treated with additional thermal oxidation immediately after deposition in the same process tube. The resistant layer is used as a barrier for the second diffusion after selective opening of the finger contact areas by screen printing of a SiO2 etching paste. The process was applied for multicrystalline Elkem Solar SoG-Si wafers as well as for references from standard EG-Si. The achieved cell parameters were compared with cell results from a homogenous emitter process. While the efficiency was not enhanced so far due to the relatively high shadow loss of the selective emitter solar cells, the open collector voltage could be increased by up to 9 mV and the short wavelength spectral response increased slightly with this selective emitter. The aim of this work was to combine the SiO2 barrier with the shallow POCl3 diffusion in one process step and the optimization of the screen
printing process for selective emitter solar cells.
Zusammenfassung in einer weiteren Sprache
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530 Physik
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solar cells, selective emitter, oxide barrier, fiducial alignment
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24th European Photovoltaic Solar Energy Conference, 21. Sept. 2009 - 25. Sept. 2009, Hamburg
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URREJOLA, Elias, Peter KRISTIAN, Anne-Karin SOILAND, Erik ENEBAKK, 2009. POCl3 diffusion with in-situ SiO2 barrier for selective emitter multicrystalline solar grade silicon solar cells. 24th European Photovoltaic Solar Energy Conference. Hamburg, 21. Sept. 2009 - 25. Sept. 2009. In: SINKE, W., ed. and others. The compiled state-of-the-art of PV solar technology and deployment : 24th European Photovoltaic Solar Energy Conference and Exhibition. Munich, Germany: WIP-Renewable Energies, 2009, pp. 1835-1838. ISBN 3-936338-25-6. Available under: doi: 10.4229/24thEUPVSEC2009-2CV.5.35BibTex
@inproceedings{Urrejola2009diffu-19443,
year={2009},
doi={10.4229/24thEUPVSEC2009-2CV.5.35},
title={POCl<sub>3</sub> diffusion with in-situ SiO<sub>2</sub> barrier for selective emitter multicrystalline solar grade silicon solar cells},
isbn={3-936338-25-6},
publisher={WIP-Renewable Energies},
address={Munich, Germany},
booktitle={The compiled state-of-the-art of PV solar technology and deployment : 24th European Photovoltaic Solar Energy Conference and Exhibition},
pages={1835--1838},
editor={Sinke, W.},
author={Urrejola, Elias and Kristian, Peter and Soiland, Anne-Karin and Enebakk, Erik}
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<dcterms:abstract xml:lang="eng">We present an innovative process for the formation of a selective emitter by using an advanced phosphorous glass as a barrier layer against subsequent diffusion. The advanced barrier glass was achieved by the formation of a standard phosphorous glass treated with additional thermal oxidation immediately after deposition in the same process tube. The resistant layer is used as a barrier for the second diffusion after selective opening of the finger contact areas by screen printing of a SiO2 etching paste. The process was applied for multicrystalline Elkem Solar SoG-Si wafers as well as for references from standard EG-Si. The achieved cell parameters were compared with cell results from a homogenous emitter process. While the efficiency was not enhanced so far due to the relatively high shadow loss of the selective emitter solar cells, the open collector voltage could be increased by up to 9 mV and the short wavelength spectral response increased slightly with this selective emitter. The aim of this work was to combine the SiO2 barrier with the shallow POCl3 diffusion in one process step and the optimization of the screen<br />printing process for selective emitter solar cells.</dcterms:abstract>
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