Gettering efficacy of APCVD PSG and BSG layers in mc-Si

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dc.contributor.authorFischer, Christian
dc.contributor.authorFichtner, Johannes
dc.contributor.authorZuschlag, Annika
dc.contributor.authorHahn, Giso
dc.date.accessioned2018-05-09T12:30:06Z
dc.date.available2018-05-09T12:30:06Z
dc.date.issued2017eng
dc.description.abstractAPCVD (atmospheric pressure chemical vapor deposition) offers promising improvements for the PERT (passivated emitter rear totally diffused) solar cell concept. One-sided diffusion of P as well as B allows reduced processing steps. In this work the gettering efficacy of P- and B-doped layers deposited by APCVD on mc (multicrystalline) Si (silicon) material is evaluated by minority charge carrier lifetime measurements. Comparison with the influence of thermal load showed that P-gettering resulted in significant lifetime increase, whereas temperature treatment without PSG (phosphor silicate glass) induced the opposed effect. Close to the crucible wall, the local defect structure in the wafer leads in ungettered samples to negative effects that can be strongly reduced by P-gettering. In addition, the APCVD PSG layers showed at least comparable gettering efficacy to standard POCl3-gettering via diffusion in a quartz tube furnace. Finally, co-diffusion of APCVD PSG and BSG layers was tested for a PERT concept.eng
dc.description.versionpublishedeng
dc.identifier.doi10.4229/EUPVSEC20172017-2AV.2.7eng
dc.identifier.ppn504987526
dc.identifier.urihttps://kops.uni-konstanz.de/handle/123456789/42285
dc.language.isoengeng
dc.rightsterms-of-use
dc.rights.urihttps://rightsstatements.org/page/InC/1.0/
dc.subjectGettering, Multicrystalline Silicon, Lifetime, APCVDeng
dc.subject.ddc530eng
dc.titleGettering efficacy of APCVD PSG and BSG layers in mc-Sieng
dc.typeINPROCEEDINGSeng
dspace.entity.typePublication
kops.citation.bibtex
@inproceedings{Fischer2017Gette-42285,
  year={2017},
  doi={10.4229/EUPVSEC20172017-2AV.2.7},
  title={Gettering efficacy of APCVD PSG and BSG layers in mc-Si},
  isbn={3-936338-47-7},
  issn={2196-0992},
  publisher={WIP},
  address={München},
  booktitle={33rd European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference},
  pages={610--612},
  editor={Smets, Arno},
  author={Fischer, Christian and Fichtner, Johannes and Zuschlag, Annika and Hahn, Giso}
}
kops.citation.iso690FISCHER, Christian, Johannes FICHTNER, Annika ZUSCHLAG, Giso HAHN, 2017. Gettering efficacy of APCVD PSG and BSG layers in mc-Si. 33rd European Photovoltaic Solar Energy Conference and Exhibition : EU PVSEC 2017. Amsterdam, 25. Sept. 2017 - 29. Sept. 2017. In: SMETS, Arno, ed. and others. 33rd European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference. München: WIP, 2017, pp. 610-612. ISSN 2196-0992. ISBN 3-936338-47-7. Available under: doi: 10.4229/EUPVSEC20172017-2AV.2.7deu
kops.citation.iso690FISCHER, Christian, Johannes FICHTNER, Annika ZUSCHLAG, Giso HAHN, 2017. Gettering efficacy of APCVD PSG and BSG layers in mc-Si. 33rd European Photovoltaic Solar Energy Conference and Exhibition : EU PVSEC 2017. Amsterdam, Sep 25, 2017 - Sep 29, 2017. In: SMETS, Arno, ed. and others. 33rd European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference. München: WIP, 2017, pp. 610-612. ISSN 2196-0992. ISBN 3-936338-47-7. Available under: doi: 10.4229/EUPVSEC20172017-2AV.2.7eng
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kops.conferencefield33rd European Photovoltaic Solar Energy Conference and Exhibition : EU PVSEC 2017, 25. Sept. 2017 - 29. Sept. 2017, Amsterdamdeu
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kops.sourcefieldSMETS, Arno, ed. and others. <i>33rd European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference</i>. München: WIP, 2017, pp. 610-612. ISSN 2196-0992. ISBN 3-936338-47-7. Available under: doi: 10.4229/EUPVSEC20172017-2AV.2.7deu
kops.sourcefield.plainSMETS, Arno, ed. and others. 33rd European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference. München: WIP, 2017, pp. 610-612. ISSN 2196-0992. ISBN 3-936338-47-7. Available under: doi: 10.4229/EUPVSEC20172017-2AV.2.7deu
kops.sourcefield.plainSMETS, Arno, ed. and others. 33rd European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference. München: WIP, 2017, pp. 610-612. ISSN 2196-0992. ISBN 3-936338-47-7. Available under: doi: 10.4229/EUPVSEC20172017-2AV.2.7eng
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source.title33rd European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conferenceeng

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