Publikation:

Gettering efficacy of APCVD PSG and BSG layers in mc-Si

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2017

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http://nbn-resolving.de/urn:nbn:de:bsz:352-2-1v5g4fp7ocfii0
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https://doi.org/10.4229/EUPVSEC20172017-2AV.2.7
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SMETS, Arno, ed. and others. 33rd European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference. München: WIP, 2017, pp. 610-612. ISSN 2196-0992. ISBN 3-936338-47-7. Available under: doi: 10.4229/EUPVSEC20172017-2AV.2.7

Zusammenfassung

APCVD (atmospheric pressure chemical vapor deposition) offers promising improvements for the PERT (passivated emitter rear totally diffused) solar cell concept. One-sided diffusion of P as well as B allows reduced processing steps. In this work the gettering efficacy of P- and B-doped layers deposited by APCVD on mc (multicrystalline) Si (silicon) material is evaluated by minority charge carrier lifetime measurements. Comparison with the influence of thermal load showed that P-gettering resulted in significant lifetime increase, whereas temperature treatment without PSG (phosphor silicate glass) induced the opposed effect. Close to the crucible wall, the local defect structure in the wafer leads in ungettered samples to negative effects that can be strongly reduced by P-gettering. In addition, the APCVD PSG layers showed at least comparable gettering efficacy to standard POCl3-gettering via diffusion in a quartz tube furnace. Finally, co-diffusion of APCVD PSG and BSG layers was tested for a PERT concept.

Zusammenfassung in einer weiteren Sprache

Fachgebiet (DDC)
530 Physik

Schlagwörter

Gettering, Multicrystalline Silicon, Lifetime, APCVD

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33rd European Photovoltaic Solar Energy Conference and Exhibition : EU PVSEC 2017, 25. Sept. 2017 - 29. Sept. 2017, Amsterdam
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ISO 690FISCHER, Christian, Johannes FICHTNER, Annika ZUSCHLAG, Giso HAHN, 2017. Gettering efficacy of APCVD PSG and BSG layers in mc-Si. 33rd European Photovoltaic Solar Energy Conference and Exhibition : EU PVSEC 2017. Amsterdam, 25. Sept. 2017 - 29. Sept. 2017. In: SMETS, Arno, ed. and others. 33rd European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference. München: WIP, 2017, pp. 610-612. ISSN 2196-0992. ISBN 3-936338-47-7. Available under: doi: 10.4229/EUPVSEC20172017-2AV.2.7
BibTex
@inproceedings{Fischer2017Gette-42285,
  year={2017},
  doi={10.4229/EUPVSEC20172017-2AV.2.7},
  title={Gettering efficacy of APCVD PSG and BSG layers in mc-Si},
  isbn={3-936338-47-7},
  issn={2196-0992},
  publisher={WIP},
  address={München},
  booktitle={33rd European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference},
  pages={610--612},
  editor={Smets, Arno},
  author={Fischer, Christian and Fichtner, Johannes and Zuschlag, Annika and Hahn, Giso}
}
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