Concentration and penetration depth of H introduced into crystalline Si by hydrogenation methods used to fabricate solar cells
| dc.contributor.author | Kleekajai, Suppawan | |
| dc.contributor.author | Jiang, Fan | |
| dc.contributor.author | Stavola, Michael | |
| dc.contributor.author | Yelundur, Vijay | |
| dc.contributor.author | Nakayashiki, Kenta | |
| dc.contributor.author | Rohatgi, Ajeet | |
| dc.contributor.author | Hahn, Giso | |
| dc.contributor.author | Seren, Sven | |
| dc.contributor.author | Kalejs, Juris | |
| dc.date.accessioned | 2018-04-27T13:20:03Z | |
| dc.date.available | 2018-04-27T13:20:03Z | |
| dc.date.issued | 2006 | eng |
| dc.description.abstract | The hydrogenation of crystalline Si by methods used to passivate defects in Si solar cells has been studied by infrared spectroscopy. For these experiments, floating-zone Si that contained Pt impurities that act as traps for H was used as a model system in which H could be directly detected. In this model system, the concentration and indiffusion depth of H were determined for different hydrogenation treatments so that their effectiveness could be compared. The postdeposition annealing of a hydrogen-rich SiNx surface layer was found to introduce H into the Si bulk with a concentration of ∼1015cm−3 under the best conditions investigated here. | eng |
| dc.description.version | published | eng |
| dc.identifier.doi | 10.1063/1.2363684 | eng |
| dc.identifier.ppn | 502653701 | |
| dc.identifier.uri | https://kops.uni-konstanz.de/handle/123456789/42192 | |
| dc.language.iso | eng | eng |
| dc.rights | terms-of-use | |
| dc.rights.uri | https://rightsstatements.org/page/InC/1.0/ | |
| dc.subject.ddc | 530 | eng |
| dc.title | Concentration and penetration depth of H introduced into crystalline Si by hydrogenation methods used to fabricate solar cells | eng |
| dc.type | JOURNAL_ARTICLE | eng |
| dspace.entity.type | Publication | |
| kops.citation.bibtex | @article{Kleekajai2006Conce-42192,
year={2006},
doi={10.1063/1.2363684},
title={Concentration and penetration depth of H introduced into crystalline Si by hydrogenation methods used to fabricate solar cells},
number={9},
volume={100},
issn={0021-8979},
journal={Journal of Applied Physics},
author={Kleekajai, Suppawan and Jiang, Fan and Stavola, Michael and Yelundur, Vijay and Nakayashiki, Kenta and Rohatgi, Ajeet and Hahn, Giso and Seren, Sven and Kalejs, Juris},
note={Article Number: 093517}
} | |
| kops.citation.iso690 | KLEEKAJAI, Suppawan, Fan JIANG, Michael STAVOLA, Vijay YELUNDUR, Kenta NAKAYASHIKI, Ajeet ROHATGI, Giso HAHN, Sven SEREN, Juris KALEJS, 2006. Concentration and penetration depth of H introduced into crystalline Si by hydrogenation methods used to fabricate solar cells. In: Journal of Applied Physics. 2006, 100(9), 093517. ISSN 0021-8979. eISSN 1089-7550. Available under: doi: 10.1063/1.2363684 | deu |
| kops.citation.iso690 | KLEEKAJAI, Suppawan, Fan JIANG, Michael STAVOLA, Vijay YELUNDUR, Kenta NAKAYASHIKI, Ajeet ROHATGI, Giso HAHN, Sven SEREN, Juris KALEJS, 2006. Concentration and penetration depth of H introduced into crystalline Si by hydrogenation methods used to fabricate solar cells. In: Journal of Applied Physics. 2006, 100(9), 093517. ISSN 0021-8979. eISSN 1089-7550. Available under: doi: 10.1063/1.2363684 | eng |
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<dcterms:abstract xml:lang="eng">The hydrogenation of crystalline Si by methods used to passivate defects in Si solar cells has been studied by infrared spectroscopy. For these experiments, floating-zone Si that contained Pt impurities that act as traps for H was used as a model system in which H could be directly detected. In this model system, the concentration and indiffusion depth of H were determined for different hydrogenation treatments so that their effectiveness could be compared. The postdeposition annealing of a hydrogen-rich SiN<sub>x</sub> surface layer was found to introduce H into the Si bulk with a concentration of ∼10<sup>15</sup>cm<sup>−3</sup> under the best conditions investigated here.</dcterms:abstract>
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| source.periodicalTitle | Journal of Applied Physics | eng |
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