Untersuchung von gesputterten Aluminiumoxid-Schichten hinsichtlich Oberflächenpassivierung bei kristallinem p-Typ Silizium

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2013
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urn:nbn:de:bsz:352-249108
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530 Physics
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Oberflächenpassivierung
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ISO 690SINGER, Florian, 2013. Untersuchung von gesputterten Aluminiumoxid-Schichten hinsichtlich Oberflächenpassivierung bei kristallinem p-Typ Silizium [Bachelor thesis]
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@mastersthesis{Singer2013Unter-24910,
  year={2013},
  title={Untersuchung von gesputterten Aluminiumoxid-Schichten hinsichtlich Oberflächenpassivierung bei kristallinem p-Typ Silizium},
  author={Singer, Florian}
}
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