Metal Interconnects

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SCHEER, Elke, 2012. Metal Interconnects. In: WASER, Rainer, ed.. Nanoelectronics and information technology : advanced electronic materials and novel devices. 3., completely rev. and enlarged ed.. Weinheim:Wiley VCH, pp. 765-776. ISBN 978-3-527-40927-3

@incollection{Scheer2012Metal-52436, title={Metal Interconnects}, year={2012}, edition={3., completely rev. and enlarged ed.}, isbn={978-3-527-40927-3}, address={Weinheim}, publisher={Wiley VCH}, booktitle={Nanoelectronics and information technology : advanced electronic materials and novel devices}, pages={765--776}, editor={Waser, Rainer}, author={Scheer, Elke} }

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