Defect analysis of APCVD gettered multicrystalline silicon
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| Type of Publication: | Contribution to a conference collection |
| Publication status: | Published |
| URI (citable link): | http://nbn-resolving.de/urn:nbn:de:bsz:352-2-12w8p592q4kmg3 |
| Author: | Fleck, Martin; Lindroos, Jeanette; Zuschlag, Annika; Hahn, Giso |
| Year of publication: | 2018 |
| Conference: | 35th European Photovoltaic Solar Energy Conference and Exhibition, Sep 24, 2018 - Oct 28, 2018, Brussels |
| Published in: | 35th European Photovoltaic Solar Energy Conference and Exhibition / Verlinden, Pierre et al. (ed.). - München : WIP, 2018. - pp. 527-530. - ISBN 978-3-936338-50-8 |
| URL of original publication: | https://www.eupvsec-planner.com/presentations/c45930/defect_analysis_of_apcvd_gettered_multicrystalline_silicon.htm, Last access on Feb 25, 2019 |
| Summary: |
The effects of atmospheric pressure chemical vapor deposition (APCVD) gettering on material quality of industry standard mc-Si wafers has been studied on a microscopic level and compared to POCl3 gettered samples. The interaction of the gettering efficacy with the microscopic defect structure has been studied by a combination of measurements of the effective minority charge carrier lifetime (eff), interstitial iron (Fei), optical microscope images of defect structures revealed with Secco etching, a subsequent high resolution etch pit density (EPD) analysis as well as Electron Beam Induced Current (EBIC) and Electron Backscatter Diffraction (EBSD). Findings include a similar gettering quality of APCVD- and POCl3-based glasses and a reduction of EPD after the gettering step.
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| Subject (DDC): | 530 Physics |
| Keywords: | Defects, Gettering, Lifetime, APCVD, Multicrystalline Silicon |
| Link to License: | In Copyright |
| Bibliography of Konstanz: | Yes |
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FLECK, Martin, Jeanette LINDROOS, Annika ZUSCHLAG, Giso HAHN, 2018. Defect analysis of APCVD gettered multicrystalline silicon. 35th European Photovoltaic Solar Energy Conference and Exhibition. Brussels, Sep 24, 2018 - Oct 28, 2018. In: VERLINDEN, Pierre, ed. and others. 35th European Photovoltaic Solar Energy Conference and Exhibition. München:WIP, pp. 527-530. ISBN 978-3-936338-50-8
@inproceedings{Fleck2018Defec-45202, title={Defect analysis of APCVD gettered multicrystalline silicon}, url={https://www.eupvsec-planner.com/presentations/c45930/defect_analysis_of_apcvd_gettered_multicrystalline_silicon.htm}, year={2018}, isbn={978-3-936338-50-8}, address={München}, publisher={WIP}, booktitle={35th European Photovoltaic Solar Energy Conference and Exhibition}, pages={527--530}, editor={Verlinden, Pierre}, author={Fleck, Martin and Lindroos, Jeanette and Zuschlag, Annika and Hahn, Giso} }
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