Optical second-harmonic probe for ultra-high frequency on-chip interconnects with benzocyclobutene

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1998
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Meyer, Christoph
Heiliger, Hanns-Michael
Kurz, Heinrich
Hey, Rudolf
Ploog, Klaus
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Applied Physics Letters. 1998, 72(9), pp. 1018-1020. Available under: doi: 10.1063/1.120952
Zusammenfassung

We report the application of electric field-induced second-harmonic (EFISH) generation for time-resolved measurement of ultra-fast electrical pulses propagating on thin-film microstrip lines fabricated with a polymer based on benzocyclobutene as a dielectric layer on a silicon substrate. This contactless field detection enables the characterization of electric pulses on the transmission line up to 1.95 THz. In comparison to external electro-optic sampling the EFISH technique provides a better characterization tool concerning time-resolution and noninvasiveness.

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ISO 690NAGEL, Michael, Christoph MEYER, Hanns-Michael HEILIGER, Thomas DEKORSY, Heinrich KURZ, Rudolf HEY, Klaus PLOOG, 1998. Optical second-harmonic probe for ultra-high frequency on-chip interconnects with benzocyclobutene. In: Applied Physics Letters. 1998, 72(9), pp. 1018-1020. Available under: doi: 10.1063/1.120952
BibTex
@article{Nagel1998Optic-5237,
  year={1998},
  doi={10.1063/1.120952},
  title={Optical second-harmonic probe for ultra-high frequency on-chip interconnects with benzocyclobutene},
  number={9},
  volume={72},
  journal={Applied Physics Letters},
  pages={1018--1020},
  author={Nagel, Michael and Meyer, Christoph and Heiliger, Hanns-Michael and Dekorsy, Thomas and Kurz, Heinrich and Hey, Rudolf and Ploog, Klaus}
}
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