Publikation: Formation of Ag/Al Screen-Printing Contacts on B Emitters
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2015
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IEEE Journal of Photovoltaics. 2015, 5(1), pp. 145-151. eISSN 2156-3381. Available under: doi: 10.1109/JPHOTOV.2014.2364117
Zusammenfassung
In this study, the contact formation process of Al containing Ag screen-printing pastes to BBr3-based B emitters on Si is investigated. Therefore, a detailed scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy study of top-view and cross-sectional samples was conducted. The possible influence of a SiN∞:H antireflection coating was considered by comparing contacts with and without a SiN∞:H layer. To analyze the role of the glass frit in the paste, the contact formation of pastes without glass was examined. The results indicate that the Ag/Al contact spots grow below the Si surface/SiN∞:H layer. The glass frit is only indispensable for etching the antireflection layer-it is not needed for melting the metal in the screen-printing paste. The realized experiments lead to a phenomenological model for the contact formation process of Al containing screen-printing pastes to boron emitters.
Zusammenfassung in einer weiteren Sprache
Fachgebiet (DDC)
530 Physik
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Boron emitters, contact formation, metallization, p+Si, scanning electron microscopy (SEM), screen-printing
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FRITZ, Susanne, Markus KÖNIG, Stefanie EBERT, Axel HERGUTH, Matthias HÖRTEIS, Giso HAHN, 2015. Formation of Ag/Al Screen-Printing Contacts on B Emitters. In: IEEE Journal of Photovoltaics. 2015, 5(1), pp. 145-151. eISSN 2156-3381. Available under: doi: 10.1109/JPHOTOV.2014.2364117BibTex
@article{Fritz2015Forma-30648,
year={2015},
doi={10.1109/JPHOTOV.2014.2364117},
title={Formation of Ag/Al Screen-Printing Contacts on B Emitters},
number={1},
volume={5},
journal={IEEE Journal of Photovoltaics},
pages={145--151},
author={Fritz, Susanne and König, Markus and Ebert, Stefanie and Herguth, Axel and Hörteis, Matthias and Hahn, Giso}
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<dcterms:abstract xml:lang="eng">In this study, the contact formation process of Al containing Ag screen-printing pastes to BBr3-based B emitters on Si is investigated. Therefore, a detailed scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy study of top-view and cross-sectional samples was conducted. The possible influence of a SiN<sub>∞</sub>:H antireflection coating was considered by comparing contacts with and without a SiN<sub>∞</sub>:H layer. To analyze the role of the glass frit in the paste, the contact formation of pastes without glass was examined. The results indicate that the Ag/Al contact spots grow below the Si surface/SiN<sub>∞</sub>:H layer. The glass frit is only indispensable for etching the antireflection layer-it is not needed for melting the metal in the screen-printing paste. The realized experiments lead to a phenomenological model for the contact formation process of Al containing screen-printing pastes to boron emitters.</dcterms:abstract>
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