@article{Brinkmann2013Elect-23116,
  year={2013},
  doi={10.1016/j.solmat.2012.09.025},
  title={Electrical, optical and structural investigation of plasma-enhanced  chemical-vapour-deposited amorphous silicon oxynitride films for solar cell applications},
  volume={108},
  issn={0927-0248},
  journal={Solar Energy Materials and Solar Cells},
  pages={180--188},
  author={Brinkmann, Nils H. and Sommer, Daniel and Micard, Gabriel and Hahn, Giso and Terheiden, Barbara}
}

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