@inproceedings{Gorgulla2015Influ-34591,
  year={2015},
  doi={10.4229/EUPVSEC20152015-3DV.2.20},
  title={Influence of deposition parameters on elemental concentrations, electrical, and optical properties of magnetron co-sputtered Al-doped ZnO films},
  isbn={3-936338-39-6},
  publisher={WIP},
  address={München},
  booktitle={31st European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference held in Hamburg, Germany, 14 September - 18 September 2015},
  pages={1305--1309},
  author={Gorgulla, Angelika and Ertel, Dominik P. and Hahn, Giso and Terheiden, Barbara}
}

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