Well passivating and highly temperature stable aluminium oxide desposited by atmosphere pressure chemical vapor deposition for PERC and PERT solar cell concepts

Kurzanzeige
dc.contributor.authorEngelhardt, Josh
dc.contributor.authorGapp, Benjamin
dc.contributor.authorMutter, Florian
dc.contributor.authorHahn, Giso
dc.contributor.authorTerheiden, Barbara
dc.date.accessioned2019-02-25T13:07:27Z
dc.date.available2019-02-25T13:07:27Z
dc.date.issued2018eng
dc.description.abstractAtmospheric pressure chemical vapor deposited aluminum oxide films based on trimethyl-aluminum and oxygen as precursors reaching a surface passivation quality comparable to atomic layer deposited aluminum oxide layers are presented. Demonstrated are charge carrier lifetime values up to 8 ms on n-type Cz-Si for fired AlOx/SiNx:H passivation stacks, common to PERC and PERT solar cell designs. The APCVD AlOx layers are highly temperature stable for set peak firing temperatures in the range of 700-920°C allowing for surface recombination velocities < 2 cms- 1. The influence of temperature during AlOx deposition in the APCVD tool is investigated concerning Si material and fundamental passivation effect properties. The latter are investigated in comparison to ALD AlOx determining the underlying causes for higher lifetime after firing for APCVD AlOx films.eng
dc.description.versionpublishedeng
dc.identifier.doi10.4229/35thEUPVSEC20182018-2BO.4.4eng
dc.identifier.ppn518182169
dc.identifier.urihttps://kops.uni-konstanz.de/handle/123456789/45204
dc.language.isoengeng
dc.rightsterms-of-use
dc.rights.urihttps://rightsstatements.org/page/InC/1.0/
dc.subjectPassivation, APCVD, PERC, Aluminium Oxide, PERTeng
dc.subject.ddc530eng
dc.titleWell passivating and highly temperature stable aluminium oxide desposited by atmosphere pressure chemical vapor deposition for PERC and PERT solar cell conceptseng
dc.typeINPROCEEDINGSeng
dspace.entity.typePublication
kops.citation.bibtex
@inproceedings{Engelhardt2018passi-45204,
  year={2018},
  doi={10.4229/35thEUPVSEC20182018-2BO.4.4},
  title={Well passivating and highly temperature stable aluminium oxide desposited by atmosphere pressure chemical vapor deposition for PERC and PERT solar cell concepts},
  isbn={978-3-936338-50-8},
  publisher={WIP},
  address={München},
  booktitle={35th European Photovoltaic Solar Energy Conference and Exhibition},
  pages={390--394},
  editor={Verlinden, Pierre},
  author={Engelhardt, Josh and Gapp, Benjamin and Mutter, Florian and Hahn, Giso and Terheiden, Barbara}
}
kops.citation.iso690ENGELHARDT, Josh, Benjamin GAPP, Florian MUTTER, Giso HAHN, Barbara TERHEIDEN, 2018. Well passivating and highly temperature stable aluminium oxide desposited by atmosphere pressure chemical vapor deposition for PERC and PERT solar cell concepts. 35th European Photovoltaic Solar Energy Conference and Exhibition. Brussels, 24. Sept. 2018 - 28. Sept. 2018. In: VERLINDEN, Pierre, ed. and others. 35th European Photovoltaic Solar Energy Conference and Exhibition. München: WIP, 2018, pp. 390-394. ISBN 978-3-936338-50-8. Available under: doi: 10.4229/35thEUPVSEC20182018-2BO.4.4deu
kops.citation.iso690ENGELHARDT, Josh, Benjamin GAPP, Florian MUTTER, Giso HAHN, Barbara TERHEIDEN, 2018. Well passivating and highly temperature stable aluminium oxide desposited by atmosphere pressure chemical vapor deposition for PERC and PERT solar cell concepts. 35th European Photovoltaic Solar Energy Conference and Exhibition. Brussels, Sep 24, 2018 - Sep 28, 2018. In: VERLINDEN, Pierre, ed. and others. 35th European Photovoltaic Solar Energy Conference and Exhibition. München: WIP, 2018, pp. 390-394. ISBN 978-3-936338-50-8. Available under: doi: 10.4229/35thEUPVSEC20182018-2BO.4.4eng
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kops.conferencefield35th European Photovoltaic Solar Energy Conference and Exhibition, 24. Sept. 2018 - 28. Sept. 2018, Brusselsdeu
kops.date.conferenceEnd2018-09-28eng
kops.date.conferenceStart2018-09-24eng
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kops.sourcefieldVERLINDEN, Pierre, ed. and others. <i>35th European Photovoltaic Solar Energy Conference and Exhibition</i>. München: WIP, 2018, pp. 390-394. ISBN 978-3-936338-50-8. Available under: doi: 10.4229/35thEUPVSEC20182018-2BO.4.4deu
kops.sourcefield.plainVERLINDEN, Pierre, ed. and others. 35th European Photovoltaic Solar Energy Conference and Exhibition. München: WIP, 2018, pp. 390-394. ISBN 978-3-936338-50-8. Available under: doi: 10.4229/35thEUPVSEC20182018-2BO.4.4deu
kops.sourcefield.plainVERLINDEN, Pierre, ed. and others. 35th European Photovoltaic Solar Energy Conference and Exhibition. München: WIP, 2018, pp. 390-394. ISBN 978-3-936338-50-8. Available under: doi: 10.4229/35thEUPVSEC20182018-2BO.4.4eng
kops.title.conference35th European Photovoltaic Solar Energy Conference and Exhibitioneng
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