High Efficiency Industrial PERC Solar Cells with all PECVD-Based Rear Surface Passivation

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2011
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Petres, Roman
Glatz-Reichenbach, Joachim
Peter, Kristian
Wefringhaus, Eckard
Schubert, Gunnar
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OSSENBRINK, H., ed. and others. 26th European Photovoltaic Solar Energy Conference and Exhibition : the most inspiring platform for the global PV solar sector. München: WIP Renewable Energies, 2011, pp. 2233-2236. ISBN 3-936338-27-2. Available under: doi: 10.4229/26thEUPVSEC2011-2CV.4.34
Zusammenfassung

In the photovoltaic industry both the reduction of the silicon material thickness and the increase of the solar cells efficiency are critical topics for cost reduction. This work presents an innovative and industrially applicable Si-based passivation layer deposited by PECVD, with high passivation quality for the lowly doped p-type rear surface of PERC solar cells. Applying only high-throughput PECVD processes for surface passivation, the PERC process as presented in this work, might be completely feasible for industrial applications. We achieved efficiencies of 19% on monocrystalline p-type Cz-Si and above 17.2% on multicrystalline p-type wafers. The processing of the wafers is developed at a standard industrial level, and no special equipment or processing was required for achieving this efficiencies.

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530 Physik
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Rear Surface Passivation, High Efficiency, PERC, Al-BSF Formation
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26th European Photovoltaic Solar Energy Conference and Exhibition, 5. Sept. 2011 - 9. Sept. 2011, CCH Congress Centre and International Fair, Hamburg, Germany
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ISO 690URREJOLA, Elias, Roman PETRES, Joachim GLATZ-REICHENBACH, Kristian PETER, Eckard WEFRINGHAUS, Heiko PLAGWITZ, Gunnar SCHUBERT, 2011. High Efficiency Industrial PERC Solar Cells with all PECVD-Based Rear Surface Passivation. 26th European Photovoltaic Solar Energy Conference and Exhibition. CCH Congress Centre and International Fair, Hamburg, Germany, 5. Sept. 2011 - 9. Sept. 2011. In: OSSENBRINK, H., ed. and others. 26th European Photovoltaic Solar Energy Conference and Exhibition : the most inspiring platform for the global PV solar sector. München: WIP Renewable Energies, 2011, pp. 2233-2236. ISBN 3-936338-27-2. Available under: doi: 10.4229/26thEUPVSEC2011-2CV.4.34
BibTex
@inproceedings{Urrejola2011Effic-19444,
  year={2011},
  doi={10.4229/26thEUPVSEC2011-2CV.4.34},
  title={High Efficiency Industrial PERC Solar Cells with all PECVD-Based Rear Surface Passivation},
  isbn={3-936338-27-2},
  publisher={WIP Renewable Energies},
  address={München},
  booktitle={26th European Photovoltaic Solar Energy Conference and Exhibition : the most inspiring platform for the global PV solar sector},
  pages={2233--2236},
  editor={Ossenbrink, H.},
  author={Urrejola, Elias and Petres, Roman and Glatz-Reichenbach, Joachim and Peter, Kristian and Wefringhaus, Eckard and Plagwitz, Heiko and Schubert, Gunnar}
}
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