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High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films

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098_procspie_1991.pdf
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1991

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Albrecht, Uwe
Dilger, Herbert
Evers, Peter

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Process Module Metrology, Control and Clustering, Proceedings of SPIE. 1991, pp. 344-351

Zusammenfassung

We describe the use of optically excited surface plasmons to measure the thickness of ultrathin films deposited on gold and silver surfaces with submonolayer resolution. Additional structural information on the film is obtained by looking at the scattering of the surface plasmons. Applications of this method to physisorbed and quench-condensed molecular hydrogen films and to spreading of liquids are presented.

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530 Physik

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ISO 690ALBRECHT, Uwe, Herbert DILGER, Peter EVERS, Paul LEIDERER, 1991. High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films. In: Process Module Metrology, Control and Clustering, Proceedings of SPIE. 1991, pp. 344-351
BibTex
@inproceedings{Albrecht1991resol-9066,
  year={1991},
  title={High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films},
  booktitle={Process Module Metrology, Control and Clustering, Proceedings of SPIE},
  pages={344--351},
  author={Albrecht, Uwe and Dilger, Herbert and Evers, Peter and Leiderer, Paul}
}
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