Electroless nickel and copper metallization : Contact formation on crystalline silicon and background plating behavior on PECVD silicon SiNx:H layers

Kurzanzeige
dc.contributor.authorBraun, Stefan
dc.contributor.authorEmre, Erkan
dc.contributor.authorRaabe, Bernd
dc.contributor.authorHahn, Giso
dc.date.accessioned2011-10-05T09:09:24Zdeu
dc.date.available2011-10-05T09:09:24Zdeu
dc.date.issued2010deu
dc.description.abstractAn alternative approach to the silver thick film metallization for the front side of silicon solar cells can be implemented by electroless nickel and copper deposition. One of the most challenging problems for a wetchemical metallization sequence using nickel and copper is the phenomenon of background plating. Hereby the metal is not only deposited on the opened emitter structure but also on the insulating PECVD silicon nitride layer which causes additional shading to the solar cell. Contact properties of the metallization like contact resistance, adhesion and line resistance must be optimized. The nickel-silicon contact can be enhanced by an additional sintering step. In this paper the requirements for an adequate nickel silicide formation are discussed and it is shown how to reduce the problem of background plating on PECVD SiNx:H surfaces.eng
dc.description.versionpublished
dc.identifier.citationPubl. in: 25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion : proceedings of the international conference held 6-10 September 2010, in Valencia, Spain / G.F. de Santi, H. Ossenbrink and P. Helm (eds.). Munich, Germany : WIP-Renewable Energies, 2010. pp. 1892-1895deu
dc.identifier.doi10.4229/25thEUPVSEC2010-2CV.2.51deu
dc.identifier.ppn510280439
dc.identifier.urihttp://kops.uni-konstanz.de/handle/123456789/16010
dc.language.isoengdeu
dc.legacy.dateIssued2011-10-05deu
dc.rightsterms-of-use
dc.rights.urihttps://rightsstatements.org/page/InC/1.0/
dc.subjectnickel platingdeu
dc.subjectnickel silicidedeu
dc.subjectbackground platingdeu
dc.subject.ddc530deu
dc.titleElectroless nickel and copper metallization : Contact formation on crystalline silicon and background plating behavior on PECVD silicon SiN<sub>x</sub>:H layerseng
dc.typeINPROCEEDINGSdeu
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@inproceedings{Braun2010Elect-16010,
  year={2010},
  doi={10.4229/25thEUPVSEC2010-2CV.2.51},
  title={Electroless nickel and copper metallization : Contact formation on crystalline silicon and background plating behavior on PECVD silicon SiN<sub>x</sub>:H layers},
  publisher={WIP-Renewable Energies},
  address={Munich, Germany},
  booktitle={25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion},
  pages={1892--1895},
  editor={de Santi, G.F. and Ossenbrink, H. and Helm, P.},
  author={Braun, Stefan and Emre, Erkan and Raabe, Bernd and Hahn, Giso}
}
kops.citation.iso690BRAUN, Stefan, Erkan EMRE, Bernd RAABE, Giso HAHN, 2010. Electroless nickel and copper metallization : Contact formation on crystalline silicon and background plating behavior on PECVD silicon SiNx:H layers. 25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion. Valencia, Spain, 6. Sept. 2010 - 10. Sept. 2010. In: DE SANTI, G.F., ed., H. OSSENBRINK, ed., P. HELM, ed.. 25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion. Munich, Germany: WIP-Renewable Energies, 2010, pp. 1892-1895. Available under: doi: 10.4229/25thEUPVSEC2010-2CV.2.51deu
kops.citation.iso690BRAUN, Stefan, Erkan EMRE, Bernd RAABE, Giso HAHN, 2010. Electroless nickel and copper metallization : Contact formation on crystalline silicon and background plating behavior on PECVD silicon SiNx:H layers. 25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion. Valencia, Spain, Sep 6, 2010 - Sep 10, 2010. In: DE SANTI, G.F., ed., H. OSSENBRINK, ed., P. HELM, ed.. 25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion. Munich, Germany: WIP-Renewable Energies, 2010, pp. 1892-1895. Available under: doi: 10.4229/25thEUPVSEC2010-2CV.2.51eng
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kops.conferencefield25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion, 6. Sept. 2010 - 10. Sept. 2010, Valencia, Spaindeu
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kops.sourcefieldDE SANTI, G.F., ed., H. OSSENBRINK, ed., P. HELM, ed.. <i>25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion</i>. Munich, Germany: WIP-Renewable Energies, 2010, pp. 1892-1895. Available under: doi: 10.4229/25thEUPVSEC2010-2CV.2.51deu
kops.sourcefield.plainDE SANTI, G.F., ed., H. OSSENBRINK, ed., P. HELM, ed.. 25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion. Munich, Germany: WIP-Renewable Energies, 2010, pp. 1892-1895. Available under: doi: 10.4229/25thEUPVSEC2010-2CV.2.51deu
kops.sourcefield.plainDE SANTI, G.F., ed., H. OSSENBRINK, ed., P. HELM, ed.. 25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion. Munich, Germany: WIP-Renewable Energies, 2010, pp. 1892-1895. Available under: doi: 10.4229/25thEUPVSEC2010-2CV.2.51eng
kops.submitter.emaillarysa.herasymova@uni-konstanz.dedeu
kops.title.conference25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion
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source.contributor.editorde Santi, G.F.
source.contributor.editorOssenbrink, H.
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source.publisherWIP-Renewable Energies
source.publisher.locationMunich, Germany
source.title25th European Photovoltaic Solar Energy Conference and Exhibition. 5th World Conference on photovoltaic Energy Conversion

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