Influence of deposition parameters on elemental concentrations, electrical, and optical properties of magnetron co-sputtered Al-doped ZnO films - Gorgulla, Angelika; Ertel, Dominik P.; Hahn, Giso; Terheiden, Barbara (My University, 2015)
Keywords: TCO, AZO, ZnO:Al, heterojunction solar cells, magnetron sputtering; 530