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Development of an In-Line Capable Sputtering Process of Silicon Nitride for Crystalline Silicon Solar Cells

Development of an In-Line Capable Sputtering Process of Silicon Nitride for Crystalline Silicon Solar Cells

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SCHOLZ, Sascha, S. VOSER, G. DOVIDS, Helge HAVERKAMP, Giso HAHN, 2008. Development of an In-Line Capable Sputtering Process of Silicon Nitride for Crystalline Silicon Solar Cells. 23rd European Photovoltaic Solar Energy Conference, EU PVSEC. Valencia, Spain, 1. Sep 2008 - 5. Sep 2008. In: LINCOT, D., ed. and others. The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference. 23rd European Photovoltaic Solar Energy Conference, EU PVSEC. Valencia, Spain, 1. Sep 2008 - 5. Sep 2008. München:WIP Renewable Energies, pp. 1717-1719. Available under: doi: 10.4229/23rdEUPVSEC2008-2CV.5.42

@inproceedings{Scholz2008Devel-999, title={Development of an In-Line Capable Sputtering Process of Silicon Nitride for Crystalline Silicon Solar Cells}, year={2008}, doi={10.4229/23rdEUPVSEC2008-2CV.5.42}, address={München}, publisher={WIP Renewable Energies}, booktitle={The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference}, pages={1717--1719}, editor={Lincot, D.}, author={Scholz, Sascha and Voser, S. and Dovids, G. and Haverkamp, Helge and Hahn, Giso} }

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