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Bulk hydrogenation in mc-Si by PECVD SiNx deposition using direct and remote plasma

Bulk hydrogenation in mc-Si by PECVD SiNx deposition using direct and remote plasma

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HERZOG, Bernhard, Giso HAHN, Marc HOFMANN, Ingrid G. ROMIJN, Arthur W. WEEBER, 2008. Bulk hydrogenation in mc-Si by PECVD SiNx deposition using direct and remote plasma. 23rd European Photovoltaic Solar Energy Conference, EU PVSEC. Valencia, Spain, 1. Sep 2008 - 5. Sep 2008. In: LINCOT, D., ed. and others. The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference. München:WIP Renewable Energies, pp. 1863-1866. Available under: doi: 10.4229/23rdEUPVSEC2008-2DV.1.8

@inproceedings{Herzog2008hydro-985, title={Bulk hydrogenation in mc-Si by PECVD SiNx deposition using direct and remote plasma}, year={2008}, doi={10.4229/23rdEUPVSEC2008-2DV.1.8}, address={München}, publisher={WIP Renewable Energies}, booktitle={The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference}, pages={1863--1866}, editor={Lincot, D.}, author={Herzog, Bernhard and Hahn, Giso and Hofmann, Marc and Romijn, Ingrid G. and Weeber, Arthur W.} }

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