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Bulk hydrogenation in mc-Si by PECVD SiNx deposition using direct and remote plasma

Bulk hydrogenation in mc-Si by PECVD SiNx deposition using direct and remote plasma

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HERZOG, Bernhard, Giso HAHN, Marc HOFMANN, Ingrid G. ROMIJN, Arthur W. WEEBER, 2008. Bulk hydrogenation in mc-Si by PECVD SiNx deposition using direct and remote plasma. 23rd European Photovoltaic Solar Energy Conference, EU PVSEC. Valencia, Spain, 1. Sep 2008 - 5. Sep 2008. In: LINCOT, D., ed. and others. The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference. 23rd European Photovoltaic Solar Energy Conference, EU PVSEC. Valencia, Spain, 1. Sep 2008 - 5. Sep 2008. München:WIP Renewable Energies, pp. 1863-1866

@inproceedings{Herzog2008hydro-985, title={Bulk hydrogenation in mc-Si by PECVD SiNx deposition using direct and remote plasma}, year={2008}, doi={10.4229/23rdEUPVSEC2008-2DV.1.8}, address={München}, publisher={WIP Renewable Energies}, booktitle={The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference}, pages={1863--1866}, editor={Lincot, D.}, author={Herzog, Bernhard and Hahn, Giso and Hofmann, Marc and Romijn, Ingrid G. and Weeber, Arthur W.} }

<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:bibo="http://purl.org/ontology/bibo/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:dcterms="http://purl.org/dc/terms/" xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > <rdf:Description rdf:about="https://kops.uni-konstanz.de/rdf/resource/123456789/985"> <dc:contributor>Hahn, Giso</dc:contributor> <dc:language>fra</dc:language> <dcterms:abstract xml:lang="eng">Our investigation focuses on the effect of bulk hydrogenation in mc-Si via PECVD SiNx deposition at low temperatures, so without a subsequent firing step. In a recent publication we have shown that bulk lifetime improvement in mc-Si takes place during PECVD SiNx deposition at 450°C in a PECVD furnace with direct plasma and low plasma generator frequency. In this work we study the bulk hydrogenation of mc-Si during SiNx deposition in different PECVD systems with direct and remote plasma. Tests were performed on p-type and n-type wafers from mc-Si ingots, p-type String Ribbon wafers and p-type EFG ribbon wafers. Neighbouring and adjacent wafers respectively are used to compare bulk lifetimes after single and double sided SiNx deposition on wafers as grown and after P-gettering. Bulk lifetime was measured spatially resolved with μ-PCD. Surface passivation was provided with an iodine-ethanol solution. Significant bulk lifetime improvement in mc-Si takes place during SiNx deposition at low temperatures in PECVD systems with direct and remote plasma, without additional firing step. The effect varies for different mc-Si materials, however, a general statement for all mc-Si materials is difficult.</dcterms:abstract> <dcterms:bibliographicCitation>The compiled state-of-the-art of PV solar technology and deployment : 23rd European Photovoltaic Solar Energy Conference, EU PVSEC, Valencia, Spain, 1 - 5 September 2008 ; proceedings / Ed. by: D. Lincot ... Munich : WIP-Renewable Energies, 2008, pp. 1863-1866</dcterms:bibliographicCitation> <dc:creator>Weeber, Arthur W.</dc:creator> <dc:creator>Hofmann, Marc</dc:creator> <dc:creator>Romijn, Ingrid G.</dc:creator> <dc:creator>Herzog, Bernhard</dc:creator> <dc:contributor>Herzog, Bernhard</dc:contributor> <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-03-22T17:52:38Z</dc:date> <dc:contributor>Weeber, Arthur W.</dc:contributor> <dcterms:title>Bulk hydrogenation in mc-Si by PECVD SiNx deposition using direct and remote plasma</dcterms:title> <dcterms:issued>2008</dcterms:issued> <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/985"/> <dc:rights>deposit-license</dc:rights> <dc:creator>Hahn, Giso</dc:creator> <dc:contributor>Romijn, Ingrid G.</dc:contributor> <dcterms:rights rdf:resource="http://nbn-resolving.org/urn:nbn:de:bsz:352-20140905103416863-3868037-7"/> <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-03-22T17:52:38Z</dcterms:available> <dc:contributor>Hofmann, Marc</dc:contributor> </rdf:Description> </rdf:RDF>

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