Surface acceleration during dry laser cleaning of silicon


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DOBLER, Volker, Roland OLTRA, Jean-Pierre BOQUILLON, Mario MOSBACHER, Johannes BONEBERG, Paul LEIDERER, 1999. Surface acceleration during dry laser cleaning of silicon. In: Applied Physics A. 69, pp. 335-337. Available under: doi: 10.1007/s003390051412

@article{Dobler1999Surfa-9466, title={Surface acceleration during dry laser cleaning of silicon}, year={1999}, doi={10.1007/s003390051412}, volume={69}, journal={Applied Physics A}, pages={335--337}, author={Dobler, Volker and Oltra, Roland and Boquillon, Jean-Pierre and Mosbacher, Mario and Boneberg, Johannes and Leiderer, Paul} }

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