Deposition of mass-selected cluster ions using a pulsed arc cluster-ion source


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KLIPP, Björn, Martin GRASS, Jürgen MÜLLER, Davor STOLCIC, Ulrich LUTZ, Gerd GANTEFÖR, Thomas SCHLENKER, Johannes BONEBERG, Paul LEIDERER, 2001. Deposition of mass-selected cluster ions using a pulsed arc cluster-ion source. In: Applied Physics / A. 73(5), pp. 547-554. Available under: doi: 10.1007/s003390100947

@article{Klipp2001Depos-9415, title={Deposition of mass-selected cluster ions using a pulsed arc cluster-ion source}, year={2001}, doi={10.1007/s003390100947}, number={5}, volume={73}, journal={Applied Physics / A}, pages={547--554}, author={Klipp, Björn and Grass, Martin and Müller, Jürgen and Stolcic, Davor and Lutz, Ulrich and Ganteför, Gerd and Schlenker, Thomas and Boneberg, Johannes and Leiderer, Paul} }

<rdf:RDF xmlns:dcterms="" xmlns:dc="" xmlns:rdf="" xmlns:bibo="" xmlns:dspace="" xmlns:foaf="" xmlns:void="" xmlns:xsd="" > <rdf:Description rdf:about=""> <dc:contributor>Lutz, Ulrich</dc:contributor> <dcterms:isPartOf rdf:resource=""/> <dc:contributor>Klipp, Björn</dc:contributor> <dc:creator>Grass, Martin</dc:creator> <dc:date rdf:datatype="">2011-03-24T17:56:19Z</dc:date> <dc:creator>Ganteför, Gerd</dc:creator> <dc:contributor>Schlenker, Thomas</dc:contributor> <dc:contributor>Boneberg, Johannes</dc:contributor> <dcterms:available rdf:datatype="">2011-03-24T17:56:19Z</dcterms:available> <dspace:hasBitstream rdf:resource=""/> <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/> <dc:contributor>Müller, Jürgen</dc:contributor> <dcterms:title>Deposition of mass-selected cluster ions using a pulsed arc cluster-ion source</dcterms:title> <dc:creator>Lutz, Ulrich</dc:creator> <dc:format>application/pdf</dc:format> <dcterms:hasPart rdf:resource=""/> <dc:rights>terms-of-use</dc:rights> <dcterms:issued>2001</dcterms:issued> <dc:creator>Boneberg, Johannes</dc:creator> <dc:contributor>Grass, Martin</dc:contributor> <dc:creator>Leiderer, Paul</dc:creator> <dc:contributor>Ganteför, Gerd</dc:contributor> <dspace:isPartOfCollection rdf:resource=""/> <dc:creator>Klipp, Björn</dc:creator> <dcterms:rights rdf:resource=""/> <dc:contributor>Stolcic, Davor</dc:contributor> <dcterms:abstract xml:lang="eng">A PACIS (pulsed arc cluster-ion source) developed for high average cluster-ion currents is presented. The performance of the PACIS at different operational modes is described, and the suitability for cluster-deposition experiments is discussed in comparison with other cluster-ion sources. Maximum currents of mass-selected cluster ions of 3 6 nA of small Si-n (n = 4 10) clusters and 0.3 0.5 nA of large Aln +/- (n = 20 70) clusters are achieved. The mass-selected cluster ions are soft-landed on a substrate at residual kinetic energies lower than 1 eV/atom, and the samples are characterized by X-ray photoelectron spectroscopy and scanning tunneling microscopy. First results on the soft landing of magic Si-4 clusters on graphite are presented.</dcterms:abstract> <dc:creator>Schlenker, Thomas</dc:creator> <dcterms:bibliographicCitation>First publ. in: Applied Physics / A 73 (2001), 5, pp. 547-554</dcterms:bibliographicCitation> <bibo:uri rdf:resource=""/> <dc:creator>Müller, Jürgen</dc:creator> <dc:creator>Stolcic, Davor</dc:creator> <dc:language>eng</dc:language> <dc:contributor>Leiderer, Paul</dc:contributor> <foaf:homepage rdf:resource="http://localhost:8080/jspui"/> </rdf:Description> </rdf:RDF>

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