Energy dependence of quantum dot formation by ion sputtering

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FACSKO, Stefan, Heinrich KURZ, Thomas DEKORSY, 2001. Energy dependence of quantum dot formation by ion sputtering. In: Physical Review B. 63(16), 165329. Available under: doi: 10.1103/PhysRevB.63.165329

@article{Facsko2001Energ-9305, title={Energy dependence of quantum dot formation by ion sputtering}, year={2001}, doi={10.1103/PhysRevB.63.165329}, number={16}, volume={63}, journal={Physical Review B}, author={Facsko, Stefan and Kurz, Heinrich and Dekorsy, Thomas}, note={Article Number: 165329} }

<rdf:RDF xmlns:dcterms="" xmlns:dc="" xmlns:rdf="" xmlns:bibo="" xmlns:dspace="" xmlns:foaf="" xmlns:void="" xmlns:xsd="" > <rdf:Description rdf:about=""> <dcterms:title>Energy dependence of quantum dot formation by ion sputtering</dcterms:title> <dc:creator>Dekorsy, Thomas</dc:creator> <dc:creator>Kurz, Heinrich</dc:creator> <dc:creator>Facsko, Stefan</dc:creator> <dcterms:hasPart rdf:resource=""/> <dcterms:issued>2001</dcterms:issued> <dspace:hasBitstream rdf:resource=""/> <foaf:homepage rdf:resource="http://localhost:8080/jspui"/> <dcterms:abstract xml:lang="eng">Ordered quantum dot patterns are generated on GaSb and InSb surfaces due to a surface instability induced by Ar+-ion sputtering at normal incidence. The characteristic length of the generated patterns scales with the square root of the ion energy over the energy range of 75 1800 eV. This energy dependence is compared to the solutions of the isotropic Kuramoto-Sivashinsky equation and allows the determination of the lateral width of the energy distribution deposited by the incident ions in the very-low-energy range. We show that the observed energy dependence is in agreement with the linear continuum theory under the assumption that the dominant smoothing process is due to effective ion-induced diffusion without mass transport on the surface.</dcterms:abstract> <dc:language>eng</dc:language> <dcterms:rights rdf:resource=""/> <dspace:isPartOfCollection rdf:resource=""/> <dc:contributor>Dekorsy, Thomas</dc:contributor> <dc:format>application/pdf</dc:format> <dc:contributor>Facsko, Stefan</dc:contributor> <bibo:uri rdf:resource=""/> <dcterms:available rdf:datatype="">2011-03-24T17:55:20Z</dcterms:available> <dcterms:isPartOf rdf:resource=""/> <dc:contributor>Kurz, Heinrich</dc:contributor> <dc:date rdf:datatype="">2011-03-24T17:55:20Z</dc:date> <dc:rights>Attribution-NonCommercial-NoDerivs 2.0 Generic</dc:rights> <dcterms:bibliographicCitation>First publ. in: Physical Review B 63 (2001), 16, 165329</dcterms:bibliographicCitation> <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/> </rdf:Description> </rdf:RDF>

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