Laserablation von dielektrischen Schichten

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SOMMER, Daniel, 2009. Laserablation von dielektrischen Schichten [Bachelor thesis]

@mastersthesis{Sommer2009Laser-9293, title={Laserablation von dielektrischen Schichten}, year={2009}, author={Sommer, Daniel} }

This bachelor thesis is about contacting silicon-solarcells by using a nanosecond pulsed laser to define the contact area. The basic idea is to open a dielectrica on a silicon-wafer with a laser to create a low-impedance contact without damaging the subjacent silicon. Methods for analysis are lightmicroscopes, scanning electron microscopes, lifetime measurements(QSSPC, µPCD) so as sheet and contact resistances.<br />Results are SiO2 formation through laser radiation on substrate, reduced lifetime in Si-bulk, reduced sheet resistance in the emitter layer and acceptable contact resistances. Results may lead to apply pico- or femtosecond lasers. deu application/pdf 2009 Laserablation von dielektrischen Schichten 2011-03-24T17:55:15Z 2011-03-24T17:55:15Z Sommer, Daniel Laserablation of dielectric layers Sommer, Daniel terms-of-use

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