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High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films

High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films

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ALBRECHT, Uwe, Herbert DILGER, Peter EVERS, Paul LEIDERER, 1991. High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films. In: Process Module Metrology, Control and Clustering, Proceedings of SPIE. 1594, pp. 344-351

@inproceedings{Albrecht1991resol-9066, title={High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films}, year={1991}, booktitle={Process Module Metrology, Control and Clustering, Proceedings of SPIE}, pages={344--351}, author={Albrecht, Uwe and Dilger, Herbert and Evers, Peter and Leiderer, Paul} }

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