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High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films

High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films

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ALBRECHT, Uwe, Herbert DILGER, Peter EVERS, Paul LEIDERER, 1991. High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films. In: Process Module Metrology, Control and Clustering, Proceedings of SPIE. 1594, pp. 344-351

@inproceedings{Albrecht1991resol-9066, title={High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films}, year={1991}, booktitle={Process Module Metrology, Control and Clustering, Proceedings of SPIE}, pages={344--351}, author={Albrecht, Uwe and Dilger, Herbert and Evers, Peter and Leiderer, Paul} }

<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:bibo="http://purl.org/ontology/bibo/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:dcterms="http://purl.org/dc/terms/" xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > <rdf:Description rdf:about="https://kops.uni-konstanz.de/rdf/resource/123456789/9066"> <dcterms:bibliographicCitation>First publ. in: Process Module Metrology, Control and Clustering, Proceedings of SPIE, Vol. 1594 (1991), pp. 344-351</dcterms:bibliographicCitation> <dc:language>eng</dc:language> <dc:contributor>Dilger, Herbert</dc:contributor> <dc:creator>Leiderer, Paul</dc:creator> <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/9066"/> <dcterms:rights rdf:resource="https://creativecommons.org/licenses/by-nc-nd/2.0/legalcode"/> <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-03-24T17:53:18Z</dc:date> <dc:rights>deposit-license</dc:rights> <dc:creator>Dilger, Herbert</dc:creator> <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-03-24T17:53:18Z</dcterms:available> <dc:format>application/pdf</dc:format> <dc:contributor>Albrecht, Uwe</dc:contributor> <dcterms:issued>1991</dcterms:issued> <dc:creator>Albrecht, Uwe</dc:creator> <dcterms:title>High resolution surface plasmon measurements - a sensitive probe for thickness and structural information of ultrathin films</dcterms:title> <dcterms:abstract xml:lang="eng">We describe the use of optically excited surface plasmons to measure the thickness of ultrathin films deposited on gold and silver surfaces with submonolayer resolution. Additional structural information on the film is obtained by looking at the scattering of the surface plasmons. Applications of this method to physisorbed and quench-condensed molecular hydrogen films and to spreading of liquids are presented.</dcterms:abstract> <dc:creator>Evers, Peter</dc:creator> <dc:contributor>Evers, Peter</dc:contributor> <dc:contributor>Leiderer, Paul</dc:contributor> </rdf:Description> </rdf:RDF>

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