Atomic layer deposition of yttrium iron garnet thin films

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LAMMEL, Michaela, Daniel SCHEFFLER, Darius POHL, Peter SWEKIS, Sven REITZIG, Luise SIEGL, Bernd RELLINGHAUS, Lukas M. ENG, Sebastian T. B. GOENNENWEIN, Andy THOMAS, 2022. Atomic layer deposition of yttrium iron garnet thin films. In: Physical Review Materials. American Physical Society. 6, 044411. eISSN 2475-9953. Available under: doi: 10.1103/PhysRevMaterials.6.044411

@article{Lammel2022Atomi-57658, title={Atomic layer deposition of yttrium iron garnet thin films}, year={2022}, doi={10.1103/PhysRevMaterials.6.044411}, volume={6}, journal={Physical Review Materials}, author={Lammel, Michaela and Scheffler, Daniel and Pohl, Darius and Swekis, Peter and Reitzig, Sven and Siegl, Luise and Rellinghaus, Bernd and Eng, Lukas M. and Goennenwein, Sebastian T. B. and Thomas, Andy}, note={Article Number: 044411} }

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