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Nanoparticle adhesion and removal studied by pulsed laser irradiation

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LEIDERER, Paul, Michael OLAPINSKI, Mario MOSBACHER, Johannes BONEBERG, 2006. Nanoparticle adhesion and removal studied by pulsed laser irradiation. In: High-Power Laser Ablation VI / Proc SPIE. 6261, 62610F. Available under: doi: 10.1117/12.675552

@article{Leiderer2006Nanop-5363, title={Nanoparticle adhesion and removal studied by pulsed laser irradiation}, year={2006}, doi={10.1117/12.675552}, volume={6261}, journal={High-Power Laser Ablation VI / Proc SPIE}, author={Leiderer, Paul and Olapinski, Michael and Mosbacher, Mario and Boneberg, Johannes}, note={Article Number: 62610F} }

<rdf:RDF xmlns:dcterms="" xmlns:dc="" xmlns:rdf="" xmlns:bibo="" xmlns:dspace="" xmlns:foaf="" xmlns:void="" xmlns:xsd="" > <rdf:Description rdf:about=""> <dspace:hasBitstream rdf:resource=""/> <dc:creator>Leiderer, Paul</dc:creator> <foaf:homepage rdf:resource="http://localhost:8080/jspui"/> <dc:contributor>Mosbacher, Mario</dc:contributor> <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/> <dc:creator>Boneberg, Johannes</dc:creator> <dc:format>application/pdf</dc:format> <dc:contributor>Leiderer, Paul</dc:contributor> <dcterms:abstract xml:lang="eng">The contactless removal of small particles from surfaces by irradiation with intense laser pulses dubbed laser cleaning has been used and studied for nearly two decades. Nevertheless, its applicability and the mechanisms involved are still under debate. Here we give first a brief overview on relevant processes, and then present measurements of the velocities of colloidal model particles after detachment under vacuum conditions. We also demonstrate a new Laser Cleaning approach, by which submicrometer particles are removed by laser irradiation of the rear side of the wafers. The particles are detached by an acoustic shock wave traveling to the wafer front side after laser ablation of the rear side. Not only is this promising approach capable of defect free surface cleaning, detailed studies of particle velocities versus laser fluence also allow insight into the different cleaning mechanisms involved. Furthermore, this technique could be applied to determine adhesion energies of particles in the future.</dcterms:abstract> <dspace:isPartOfCollection rdf:resource=""/> <dc:rights>Attribution-NonCommercial-NoDerivs 2.0 Generic</dc:rights> <dc:creator>Olapinski, Michael</dc:creator> <dcterms:hasPart rdf:resource=""/> <dc:creator>Mosbacher, Mario</dc:creator> <dc:contributor>Boneberg, Johannes</dc:contributor> <dcterms:issued>2006</dcterms:issued> <dc:date rdf:datatype="">2011-03-24T14:55:15Z</dc:date> <dcterms:rights rdf:resource=""/> <dcterms:title>Nanoparticle adhesion and removal studied by pulsed laser irradiation</dcterms:title> <bibo:uri rdf:resource=""/> <dcterms:bibliographicCitation>First publ. in: High-Power Laser Ablation VI / Proc. SPIE 2006, Vol. 6261, 62610F</dcterms:bibliographicCitation> <dcterms:available rdf:datatype="">2011-03-24T14:55:15Z</dcterms:available> <dc:contributor>Olapinski, Michael</dc:contributor> <dc:language>eng</dc:language> <dcterms:isPartOf rdf:resource=""/> </rdf:Description> </rdf:RDF>

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