Ge-on-Si based mid-infrared plasmonics

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FRIGERIO, Jacopo, Leonetta BALDASSARRE, Giovanni PELLEGRINI, Marco P. FISCHER, Kevin GALLACHER, Ross W. MILLAR, Andrea BALLABIO, Daniele BRIDA, Giovanni ISELLA, Enrico NAPOLITANI, 2021. Ge-on-Si based mid-infrared plasmonics. Silicon Photonics XVI (online), Mar 6, 2021 - Mar 12, 2021. In: REED, Graham T., ed., Andrew P. KNIGHTS, ed.. Silicon Photonics XVI. Bellingham, Washington, USA:SPIE, 116910M. ISSN 0277-786X. eISSN 1996-756X. ISBN 978-1-5106-4217-1. Available under: doi: 10.1117/12.2576175

@inproceedings{Frigerio2021GeonS-53431, title={Ge-on-Si based mid-infrared plasmonics}, year={2021}, doi={10.1117/12.2576175}, number={11691}, isbn={978-1-5106-4217-1}, issn={0277-786X}, address={Bellingham, Washington, USA}, publisher={SPIE}, series={Proceedings of SPIE}, booktitle={Silicon Photonics XVI}, editor={Reed, Graham T. and Knights, Andrew P.}, author={Frigerio, Jacopo and Baldassarre, Leonetta and Pellegrini, Giovanni and Fischer, Marco P. and Gallacher, Kevin and Millar, Ross W. and Ballabio, Andrea and Brida, Daniele and Isella, Giovanni and Napolitani, Enrico}, note={Article Number: 116910M} }

Ballabio, Andrea Ballabio, Andrea Frigerio, Jacopo Isella, Giovanni Fischer, Marco P. 2021 eng Fischer, Marco P. Napolitani, Enrico Gallacher, Kevin terms-of-use Millar, Ross W. Frigerio, Jacopo Millar, Ross W. Baldassarre, Leonetta Brida, Daniele Baldassarre, Leonetta In the last decade, silicon photonics has undergone an impressive development driven by an increasing number of technological applications. Plasmonics has not yet made its way to the microelectronic industry, mostly because of the lack of compatibility of typical plasmonic materials with foundry processes. In this framework, we have developed a plasmonic platform based on heavily n-doped Ge grown on silicon substrates. We developed growth protocols to reach n-doping levels exceeding 10<sup>20</sup> cm<sup>-3</sup>, allowing us to tune the plasma wavelength of Ge in the 3-15 μm range. The plasmonic resonances of Ge-on-Si nanoantennas have been predicted by simulations, confirmed by experimental spectra and exploited for molecular sensing. Our work represents a benchmark for group-IV mid-IR plasmonics. Pellegrini, Giovanni Ge-on-Si based mid-infrared plasmonics Brida, Daniele Isella, Giovanni Pellegrini, Giovanni 2021-04-21T12:50:55Z 2021-04-21T12:50:55Z Napolitani, Enrico Gallacher, Kevin

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