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Chemical Stability of IrO<sub>2</sub> Top Electrodes in Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>‐based MIM Structures : The Impact of Annealing Gas

Chemical Stability of IrO2 Top Electrodes in Ferroelectric Hf0.5Zr0.5O2‐based MIM Structures : The Impact of Annealing Gas

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SZYJKA, Thomas, Lutz BAUMGARTEN, Terence MITTMANN, Yury MATVEYEV, Christoph SCHLUETER, Thomas MIKOLAJICK, Uwe SCHROEDER, Martina MÜLLER, 2021. Chemical Stability of IrO2 Top Electrodes in Ferroelectric Hf0.5Zr0.5O2‐based MIM Structures : The Impact of Annealing Gas. In: physica status solidi (RRL) : Rapid Research Letters. Wiley. ISSN 1862-6254. eISSN 1862-6270. Available under: doi: 10.1002/pssr.202100027

@article{Szyjka2021Chemi-53094, title={Chemical Stability of IrO2 Top Electrodes in Ferroelectric Hf0.5Zr0.5O2‐based MIM Structures : The Impact of Annealing Gas}, year={2021}, doi={10.1002/pssr.202100027}, issn={1862-6254}, journal={physica status solidi (RRL) : Rapid Research Letters}, author={Szyjka, Thomas and Baumgarten, Lutz and Mittmann, Terence and Matveyev, Yury and Schlueter, Christoph and Mikolajick, Thomas and Schroeder, Uwe and Müller, Martina} }

Schroeder, Uwe terms-of-use 2021-03-05T13:32:41Z Baumgarten, Lutz Müller, Martina Müller, Martina Matveyev, Yury Szyjka, Thomas Mittmann, Terence Chemical Stability of IrO<sub>2</sub> Top Electrodes in Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>‐based MIM Structures : The Impact of Annealing Gas Schlueter, Christoph Schroeder, Uwe Mikolajick, Thomas Szyjka, Thomas 2021 2021-03-05T13:32:41Z Matveyev, Yury Mikolajick, Thomas Mittmann, Terence eng Schlueter, Christoph Baumgarten, Lutz

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