KOPS - The Institutional Repository of the University of Konstanz

Chemical Stability of IrO<sub>2</sub> Top Electrodes in Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>‐based MIM Structures : The Impact of Annealing Gas

Chemical Stability of IrO2 Top Electrodes in Ferroelectric Hf0.5Zr0.5O2‐based MIM Structures : The Impact of Annealing Gas

Cite This

Files in this item

Checksum: MD5:9e896cf0d0c1a08d1bec3dee66166a1d

SZYJKA, Thomas, Lutz BAUMGARTEN, Terence MITTMANN, Yury MATVEYEV, Christoph SCHLUETER, Thomas MIKOLAJICK, Uwe SCHROEDER, Martina MÜLLER, 2021. Chemical Stability of IrO2 Top Electrodes in Ferroelectric Hf0.5Zr0.5O2‐based MIM Structures : The Impact of Annealing Gas. In: physica status solidi (RRL) : Rapid Research Letters. Wiley. 15(5), 2100027. ISSN 1862-6254. eISSN 1862-6270. Available under: doi: 10.1002/pssr.202100027

@article{Szyjka2021-05Chemi-53094, title={Chemical Stability of IrO2 Top Electrodes in Ferroelectric Hf0.5Zr0.5O2‐based MIM Structures : The Impact of Annealing Gas}, year={2021}, doi={10.1002/pssr.202100027}, number={5}, volume={15}, issn={1862-6254}, journal={physica status solidi (RRL) : Rapid Research Letters}, author={Szyjka, Thomas and Baumgarten, Lutz and Mittmann, Terence and Matveyev, Yury and Schlueter, Christoph and Mikolajick, Thomas and Schroeder, Uwe and Müller, Martina}, note={Article Number: 2100027} }

Schroeder, Uwe 2021-03-05T13:32:41Z Baumgarten, Lutz Müller, Martina Müller, Martina Matveyev, Yury Attribution-NonCommercial-NoDerivatives 4.0 International Szyjka, Thomas Mittmann, Terence Chemical Stability of IrO<sub>2</sub> Top Electrodes in Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>‐based MIM Structures : The Impact of Annealing Gas 2021-05 Schlueter, Christoph Schroeder, Uwe Mikolajick, Thomas Szyjka, Thomas 2021-03-05T13:32:41Z Matveyev, Yury Mikolajick, Thomas Mittmann, Terence eng Schlueter, Christoph Baumgarten, Lutz

Downloads since Mar 5, 2021 (Information about access statistics)

Szyjka_2-1eyquhuhauuss5.pdf 167

This item appears in the following Collection(s)

Attribution-NonCommercial-NoDerivatives 4.0 International Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivatives 4.0 International

Search KOPS


Browse

My Account