Looking Inside Micro- and Nano-Mechanical Pillar Resonators : A Picosecond Ultrasonics Approach

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2020
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Proceedings. MDPI AG. 2020, 56(1), 31. eISSN 2504-3900. Available under: doi: 10.3390/proceedings2020056031
Zusammenfassung

Pillar-shaped Gallium arsenide (GaAs) micromechanical resonators are fabricated, and the feasibility to measure the inside of the pillars in the axial direction with laser-induced GHz ultrasound based on picosecond ultrasonics is tested. Measurements on the pillars with head sizes in the µm range show excellent agreement with theoretical predictions.

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Fachgebiet (DDC)
530 Physik
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nanomechanics; elasticity; picosecond ultrasonics; nanoanalytics
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ISO 690STRITT, Paul, Juliane DOSTER, Thomas DEKORSY, Vitalyi GUSEV, Eva M. WEIG, Mike HETTICH, 2020. Looking Inside Micro- and Nano-Mechanical Pillar Resonators : A Picosecond Ultrasonics Approach. In: Proceedings. MDPI AG. 2020, 56(1), 31. eISSN 2504-3900. Available under: doi: 10.3390/proceedings2020056031
BibTex
@article{Stritt2020-12-28Looki-52398,
  year={2020},
  doi={10.3390/proceedings2020056031},
  title={Looking Inside Micro- and Nano-Mechanical Pillar Resonators : A Picosecond Ultrasonics Approach},
  number={1},
  volume={56},
  journal={Proceedings},
  author={Stritt, Paul and Doster, Juliane and Dekorsy, Thomas and Gusev, Vitalyi and Weig, Eva M. and Hettich, Mike},
  note={Article Number: 31}
}
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