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Universal threshold for the steam laser cleaning of submicron spherical particles from silicon

Universal threshold for the steam laser cleaning of submicron spherical particles from silicon

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MOSBACHER, Mario, Volker DOBLER, Johannes BONEBERG, Paul LEIDERER, 2000. Universal threshold for the steam laser cleaning of submicron spherical particles from silicon. In: Applied Physics / A, Materials Science and Processing. 70(6), pp. 669-672. Available under: doi: 10.1007/PL00021079

@article{Mosbacher2000Unive-5196, title={Universal threshold for the steam laser cleaning of submicron spherical particles from silicon}, year={2000}, doi={10.1007/PL00021079}, number={6}, volume={70}, journal={Applied Physics / A, Materials Science and Processing}, pages={669--672}, author={Mosbacher, Mario and Dobler, Volker and Boneberg, Johannes and Leiderer, Paul} }

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