The formation of nano-dot and nano-ring structures in colloidal monolayer lithography

Boneberg, Johannes; Burmeister, Frank; Schäfle, Claudia; Leiderer, Paul; Reim, D.; Fery, Andreas; Herminghaus, Stephan

The formation of nano-dot and nano-ring structures in colloidal monolayer lithography

Files

212_lang_1997.pdf(947.32 KB)

Date

1997

Authors

Boneberg, Johannes

Burmeister, Frank

Schäfle, Claudia

Leiderer, Paul

Reim, D.

Fery, Andreas

Herminghaus, Stephan

Publication type

Journal article

Published in

Langmuir : the ACS journal of surfaces and colloids ; 13 (1997), 26. - pp. 7080-7084. - ISSN 0743-7463. - eISSN 1520-5827

Abstract

Monolayers of colloidal particles formed in a self-organizingpmcess upon dryingof a colloidal suspension arc used as lithographic masks. After deposition of a thin metal layer, the mask is detached from the surface. The resulting surface is examined with optical, scanning electron, and atomic force microscopes. In addition to the well-known triangular structures, which reflect the gaps in the hexagonal arrangement of the particles, we observed the following additional features: hillocks (nano-dots) found just below and nano-rings found around the original location of the particles. These features may develop during detachment (hillocks) and formation (rings) of the mask, respectively. Hillocks develop as a consequence of the adhesion of the particles on the surface, whereas rings are formed h m organic residuals in the suspension. We show that these features can be used to fabricate fluorescent dye rings of submicron size.

Subject (DDC)

530 Physics

Cite This

ISO 690

BONEBERG, Johannes, Frank BURMEISTER, Claudia SCHÄFLE, Paul LEIDERER, D. REIM, Andreas FERY, Stephan HERMINGHAUS, 1997. The formation of nano-dot and nano-ring structures in colloidal monolayer lithography. In: Langmuir : the ACS journal of surfaces and colloids. 13(26), pp. 7080-7084. ISSN 0743-7463. eISSN 1520-5827. Available under: doi: 10.1021/la9704922

BibTex

@article{Boneberg1997forma-5171,
  year={1997},
  doi={10.1021/la9704922},
  title={The formation of nano-dot and nano-ring structures in colloidal monolayer lithography},
  number={26},
  volume={13},
  issn={0743-7463},
  journal={Langmuir : the ACS journal of surfaces and colloids},
  pages={7080--7084},
  author={Boneberg, Johannes and Burmeister, Frank and Schäfle, Claudia and Leiderer, Paul and Reim, D. and Fery, Andreas and Herminghaus, Stephan}
}

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