Optical transmission and laser structuring of silicon membranes

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JUODKAZIS, Saulius, Yasufumi NISHI, Hiroaki MISAWA, Vygantas MIZEIKIS, Olivier SCHECKER, Reimar WAITZ, Paul LEIDERER, Elke SCHEER, 2009. Optical transmission and laser structuring of silicon membranes. In: Optics express. 17(17), pp. 15308-15317. Available under: doi: 10.1364/OE.17.015308

@article{Juodkazis2009Optic-5145, title={Optical transmission and laser structuring of silicon membranes}, year={2009}, doi={10.1364/OE.17.015308}, number={17}, volume={17}, journal={Optics express}, pages={15308--15317}, author={Juodkazis, Saulius and Nishi, Yasufumi and Misawa, Hiroaki and Mizeikis, Vygantas and Schecker, Olivier and Waitz, Reimar and Leiderer, Paul and Scheer, Elke} }

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