Acoustic laser cleaning of silicon surfaces

Lade...
Vorschaubild
Dateien
Acoustic_laser_cleaning_of_silicon_surfaces.pdf
Acoustic_laser_cleaning_of_silicon_surfaces.pdfGröße: 374.98 KBDownloads: 325
Datum
2007
Herausgeber:innen
Kontakt
ISSN der Zeitschrift
Electronic ISSN
ISBN
Bibliografische Daten
Verlag
Schriftenreihe
Auflagebezeichnung
ArXiv-ID
Internationale Patentnummer
Angaben zur Forschungsförderung
Projekt
Open Access-Veröffentlichung
Open Access Green
Core Facility der Universität Konstanz
Gesperrt bis
Titel in einer weiteren Sprache
Publikationstyp
Zeitschriftenartikel
Publikationsstatus
Published
Erschienen in
Applied Physics / A, Materials Science and Processing. 2007, 89, pp. 109-113. Available under: doi: 10.1007/s00339-007-4190-7
Zusammenfassung

We investigate the detachment of small particles from silicon surfaces by means of acoustic waves generated by laser-induced plasma formation at the back side of the sample. It is demonstrated that sufficiently high acoustic intensities can be reached to detach particles in the submicron regime. In order to study this acoustic laser cleaning in more detail, we have developed an interference technique which allows one to determine the elongation and acceleration of the surface with high temporal resolution, the basis for an analysis of the nanomechanical detachment process, which takes place on a temporal scale of nanoseconds. We find that the velocity of the detaching particles is significantly higher than the maximum velocity of the substrate surface. This indicates that not only inertial forces, but also elastic deformations of the particles, resulting from the acoustic pulse, play an important role for the cleaning process.

Zusammenfassung in einer weiteren Sprache
Fachgebiet (DDC)
530 Physik
Schlagwörter
Laser Cleaning, Acoustics, Silicon
Konferenz
Rezension
undefined / . - undefined, undefined
Forschungsvorhaben
Organisationseinheiten
Zeitschriftenheft
Datensätze
Zitieren
ISO 690GELDHAUSER, Tobias, Florian ZIESE, Florian MERKT, Artur ERBE, Johannes BONEBERG, Paul LEIDERER, 2007. Acoustic laser cleaning of silicon surfaces. In: Applied Physics / A, Materials Science and Processing. 2007, 89, pp. 109-113. Available under: doi: 10.1007/s00339-007-4190-7
BibTex
@article{Geldhauser2007Acous-4959,
  year={2007},
  doi={10.1007/s00339-007-4190-7},
  title={Acoustic laser cleaning of silicon surfaces},
  volume={89},
  journal={Applied Physics / A, Materials Science and Processing},
  pages={109--113},
  author={Geldhauser, Tobias and Ziese, Florian and Merkt, Florian and Erbe, Artur and Boneberg, Johannes and Leiderer, Paul}
}
RDF
<rdf:RDF
    xmlns:dcterms="http://purl.org/dc/terms/"
    xmlns:dc="http://purl.org/dc/elements/1.1/"
    xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
    xmlns:bibo="http://purl.org/ontology/bibo/"
    xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#"
    xmlns:foaf="http://xmlns.com/foaf/0.1/"
    xmlns:void="http://rdfs.org/ns/void#"
    xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > 
  <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/4959">
    <dcterms:title>Acoustic laser cleaning of silicon surfaces</dcterms:title>
    <dc:contributor>Leiderer, Paul</dc:contributor>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/52"/>
    <dc:creator>Erbe, Artur</dc:creator>
    <dcterms:issued>2007</dcterms:issued>
    <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/>
    <dcterms:abstract xml:lang="eng">We investigate the detachment of small particles from silicon surfaces by means of acoustic waves generated by laser-induced plasma formation at the back side of the sample. It is demonstrated that sufficiently high acoustic intensities can be reached to detach particles in the submicron regime. In order to study this  acoustic laser cleaning  in more detail, we have developed an interference technique which allows one to determine the elongation and acceleration of the surface with high temporal resolution, the basis for an analysis of the nanomechanical detachment process, which takes place on a temporal scale of nanoseconds. We find that the velocity of the detaching particles is significantly higher than the maximum velocity of the substrate surface. This indicates that not only inertial forces, but also elastic deformations of the particles, resulting from the acoustic pulse, play an important role for the cleaning process.</dcterms:abstract>
    <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-03-24T14:51:41Z</dcterms:available>
    <dc:rights>terms-of-use</dc:rights>
    <dcterms:hasPart rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/4959/1/Acoustic_laser_cleaning_of_silicon_surfaces.pdf"/>
    <dc:creator>Boneberg, Johannes</dc:creator>
    <dc:format>application/pdf</dc:format>
    <dc:language>eng</dc:language>
    <foaf:homepage rdf:resource="http://localhost:8080/"/>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2011-03-24T14:51:41Z</dc:date>
    <dc:creator>Merkt, Florian</dc:creator>
    <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/4959"/>
    <dcterms:bibliographicCitation>First publ. in: Applied Physics / A, Materials Science and Processing, 89 (2007), pp. 109-113</dcterms:bibliographicCitation>
    <dc:contributor>Merkt, Florian</dc:contributor>
    <dc:creator>Leiderer, Paul</dc:creator>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:creator>Geldhauser, Tobias</dc:creator>
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/52"/>
    <dc:contributor>Erbe, Artur</dc:contributor>
    <dc:contributor>Geldhauser, Tobias</dc:contributor>
    <dc:contributor>Boneberg, Johannes</dc:contributor>
    <dc:creator>Ziese, Florian</dc:creator>
    <dspace:hasBitstream rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/4959/1/Acoustic_laser_cleaning_of_silicon_surfaces.pdf"/>
    <dc:contributor>Ziese, Florian</dc:contributor>
    <dcterms:rights rdf:resource="https://rightsstatements.org/page/InC/1.0/"/>
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
  </rdf:Description>
</rdf:RDF>
Interner Vermerk
xmlui.Submission.submit.DescribeStep.inputForms.label.kops_note_fromSubmitter
Kontakt
URL der Originalveröffentl.
Prüfdatum der URL
Prüfungsdatum der Dissertation
Finanzierungsart
Kommentar zur Publikation
Allianzlizenz
Corresponding Authors der Uni Konstanz vorhanden
Internationale Co-Autor:innen
Universitätsbibliographie
Ja
Begutachtet
Diese Publikation teilen