Acoustic laser cleaning of silicon surfaces

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GELDHAUSER, Tobias, Florian ZIESE, Florian MERKT, Artur ERBE, Johannes BONEBERG, Paul LEIDERER, 2007. Acoustic laser cleaning of silicon surfaces. In: Applied Physics / A, Materials Science and Processing. 89, pp. 109-113. Available under: doi: 10.1007/s00339-007-4190-7

@article{Geldhauser2007Acous-4959, title={Acoustic laser cleaning of silicon surfaces}, year={2007}, doi={10.1007/s00339-007-4190-7}, volume={89}, journal={Applied Physics / A, Materials Science and Processing}, pages={109--113}, author={Geldhauser, Tobias and Ziese, Florian and Merkt, Florian and Erbe, Artur and Boneberg, Johannes and Leiderer, Paul} }

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