Laser-annealing of thin semiconductor films

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BONEBERG, Johannes, Johann NEDELCU, Ernst BUCHER, Paul LEIDERER, 1994. Laser-annealing of thin semiconductor films. Advanced Laser Technologies: International Symposium. Prague, Czech Republic. In: PUSTOVOY, Vladimir I., ed., Miroslav JELINEK, ed.. Second International Symposium on Advanced Laser Technologies. SPIE, pp. 2-15. Available under: doi: 10.1117/12.195876

@inproceedings{Boneberg1994-12-12Laser-4948, title={Laser-annealing of thin semiconductor films}, year={1994}, doi={10.1117/12.195876}, number={2332}, publisher={SPIE}, series={SPIE Proceedings}, booktitle={Second International Symposium on Advanced Laser Technologies}, pages={2--15}, editor={Pustovoy, Vladimir I. and Jelinek, Miroslav}, author={Boneberg, Johannes and Nedelcu, Johann and Bucher, Ernst and Leiderer, Paul} }

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