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Ion Beam Patterning of HTS-Thin Films

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KUHN, Marcus, Bernd SCHEY, Wolfgang BIEGEL, Bernd STRITZKER, Johannes EISENMENGER, Paul LEIDERER, 1997. Ion Beam Patterning of HTS-Thin Films. In: Institute of Physics Conference Series. 158, pp. 133-136

@inproceedings{Kuhn1997Patte-4763, title={Ion Beam Patterning of HTS-Thin Films}, year={1997}, booktitle={Institute of Physics Conference Series}, pages={133--136}, author={Kuhn, Marcus and Schey, Bernd and Biegel, Wolfgang and Stritzker, Bernd and Eisenmenger, Johannes and Leiderer, Paul} }

<rdf:RDF xmlns:dcterms="" xmlns:dc="" xmlns:rdf="" xmlns:bibo="" xmlns:dspace="" xmlns:foaf="" xmlns:void="" xmlns:xsd="" > <rdf:Description rdf:about=""> <dspace:hasBitstream rdf:resource=""/> <dcterms:title>Ion Beam Patterning of HTS-Thin Films</dcterms:title> <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/> <dc:rights>Attribution-NonCommercial-NoDerivs 2.0 Generic</dc:rights> <dc:creator>Kuhn, Marcus</dc:creator> <dc:contributor>Eisenmenger, Johannes</dc:contributor> <foaf:homepage rdf:resource="http://localhost:8080/jspui"/> <dc:contributor>Schey, Bernd</dc:contributor> <dc:creator>Eisenmenger, Johannes</dc:creator> <dcterms:issued>1997</dcterms:issued> <dc:creator>Biegel, Wolfgang</dc:creator> <dcterms:bibliographicCitation>First publ. in: Institute of Physics Conference Series 158 (1997), pp. 133-136</dcterms:bibliographicCitation> <dcterms:rights rdf:resource=""/> <bibo:uri rdf:resource=""/> <dcterms:abstract xml:lang="eng">Ion implantation was used for patterning epitaxial YBCO-thin films. This patterning technique bases on a local disordering of the crystal structure of the MTS due to elastic collisions of the implanted ions. The disordering of the crystal in the irradiated areas leads to a break down uf the superconducting properties. Circular and meandering patterns with a size of 1 mm were prepared for investigations with regard to high-current-applications. Oxygen ions with an energy of 180 keV were used to avoid a contamination of the remaining superconducting-YBCO-path The achieved structures were investigated concerning a dependence on the dose by means of RBS, XRD, AFM as well as magneto-optically. Using an ion fluence of 5 x 10 14 04/cm2 a fully planar panem can be obtained.</dcterms:abstract> <dc:creator>Schey, Bernd</dc:creator> <dc:format>application/pdf</dc:format> <dc:creator>Leiderer, Paul</dc:creator> <dspace:isPartOfCollection rdf:resource=""/> <dc:language>eng</dc:language> <dcterms:isPartOf rdf:resource=""/> <dc:contributor>Stritzker, Bernd</dc:contributor> <dc:creator>Stritzker, Bernd</dc:creator> <dcterms:available rdf:datatype="">2011-03-24T14:50:09Z</dcterms:available> <dc:contributor>Kuhn, Marcus</dc:contributor> <dcterms:hasPart rdf:resource=""/> <dc:contributor>Leiderer, Paul</dc:contributor> <dc:contributor>Biegel, Wolfgang</dc:contributor> <dc:date rdf:datatype="">2011-03-24T14:50:09Z</dc:date> </rdf:Description> </rdf:RDF>

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