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A novel approach for the evaluation of a phosphorus diffusion design of experiment

A novel approach for the evaluation of a phosphorus diffusion design of experiment

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FISCHER, Gerd, Amir DASTGHEIB-SHIRAZI, Barbara TERHEIDEN, Matthias MÜLLER, 2019. A novel approach for the evaluation of a phosphorus diffusion design of experiment. SiliconPV 2019 : The 9th International Conference on Crystalline Silicon Photovoltaics. Leuven, Belgium, Apr 8, 2019 - Apr 10, 2019. In: POORTMANS, Jef, ed. and others. SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics : 8-10 April 2019, Leuven, Belgium. Melville, New York:AIP Publishing, 070003. eISSN 0094-243X. ISBN 978-0-7354-1892-9. Available under: doi: 10.1063/1.5123864

@inproceedings{Fischer2019novel-46995, title={A novel approach for the evaluation of a phosphorus diffusion design of experiment}, year={2019}, doi={10.1063/1.5123864}, number={2147,1}, isbn={978-0-7354-1892-9}, address={Melville, New York}, publisher={AIP Publishing}, series={AIP Conference Proceedings}, booktitle={SiliconPV 2019, The 9th International Conference on Crystalline Silicon Photovoltaics : 8-10 April 2019, Leuven, Belgium}, editor={Poortmans, Jef}, author={Fischer, Gerd and Dastgheib-Shirazi, Amir and Terheiden, Barbara and Müller, Matthias}, note={Article Number: 070003} }

2019-09-20T08:59:50Z Terheiden, Barbara eng 2019-09-20T08:59:50Z Terheiden, Barbara Fischer, Gerd Fischer, Gerd Dastgheib-Shirazi, Amir 2019 The emitter formation in industrial p-type silicon solar cells is generally done by phosphorus diffusion. To optimize the emitter in terms of high efficiency, series resistance and recombination losses of the emitter are balanced out. In this work, we present the results of a design of experiment (DoE) to optimize the main parameters of the P-diffusion. Therefore, we use a novel approach to evaluate the results of the DoE: We approximate the unavoidable correlation between the emitter saturation current density (j<sub>0e</sub>) and the emitter sheet resistance (ρ<sub>sh</sub>) and create a new target variable (dj<sub>0e</sub>), which describes the deviation from this correlation. This allows us to understand the key parameters that can minimize emitter saturation current density while keeping emitter sheet resistance at a target value. terms-of-use Müller, Matthias Dastgheib-Shirazi, Amir A novel approach for the evaluation of a phosphorus diffusion design of experiment Müller, Matthias

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