Investigation on the influence of illumination on the diffusion of hydrogen into crystalline silicon
| Type of Publication: | Contribution to a conference collection |
| Publication status: | Published |
| Author: | Keller, Philipp; Herguth, Axel |
| Year of publication: | 2018 |
| Conference: | SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics, Mar 19, 2018 - Mar 21, 2018, Lausanne |
| Published in: | SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics / Ballif, Christophe et al. (ed.). - Melville, NY : AIP Publishing, 2018. - (AIP Conference Proceedings ; 1999,1). - 130009. - ISSN 0094-243X. - eISSN 0094-243X. - ISBN 978-0-7354-1715-1 |
| DOI (citable link): | https://dx.doi.org/10.1063/1.5049328 |
| Summary: |
Hydrogen in-diffusion into highly boron-doped crystalline silicon from a remote hydrogen plasma with and without illumination (excess carrier injection) is investigated in the temperature range 60-200°C by means of ECV relying on the deactivation of acceptors by formation of acceptor-hydrogen pairs. Diffusivity is analyzed via the Boltzmann-Matano approach. Effective diffusivity of hydrogen under the investigated conditions is found to be strongly trap-limited. Furthermore, it is found that illumination has a decelerating influence on the effective diffusivity of hydrogen probably due to the enhancement or suppression of diffusion of differently charged hydrogen species by the electric field of the high-low junction formed by the passivation of boron in the diffused region.
|
| Subject (DDC): | 530 Physics |
| Bibliography of Konstanz: | Yes |
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KELLER, Philipp, Axel HERGUTH, 2018. Investigation on the influence of illumination on the diffusion of hydrogen into crystalline silicon. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Lausanne, Mar 19, 2018 - Mar 21, 2018. In: BALLIF, Christophe, ed. and others. SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics. Melville, NY:AIP Publishing, 130009. ISSN 0094-243X. eISSN 0094-243X. ISBN 978-0-7354-1715-1. Available under: doi: 10.1063/1.5049328
@inproceedings{Keller2018Inves-46512, title={Investigation on the influence of illumination on the diffusion of hydrogen into crystalline silicon}, year={2018}, doi={10.1063/1.5049328}, number={1999,1}, isbn={978-0-7354-1715-1}, issn={0094-243X}, address={Melville, NY}, publisher={AIP Publishing}, series={AIP Conference Proceedings}, booktitle={SiliconPV, the 8th International Conference on Crystalline Silicon Photovoltaics}, editor={Ballif, Christophe}, author={Keller, Philipp and Herguth, Axel}, note={Article Number: 130009} }
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