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Position-controlled laser-induced creation of rutile TiO<sub>2</sub> nanostructures

Position-controlled laser-induced creation of rutile TiO2 nanostructures

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KALB, Julian, Fabian WELLER, Lukas IRMLER, Vanessa KNITTEL, Philipp GRAUS, Johannes BONEBERG, Lukas SCHMIDT-MENDE, 2019. Position-controlled laser-induced creation of rutile TiO2 nanostructures. In: Nanotechnology. 30(33), 335302. ISSN 0957-4484. eISSN 1361-6528. Available under: doi: 10.1088/1361-6528/ab1964

@article{Kalb2019-08-16Posit-45996, title={Position-controlled laser-induced creation of rutile TiO2 nanostructures}, year={2019}, doi={10.1088/1361-6528/ab1964}, number={33}, volume={30}, issn={0957-4484}, journal={Nanotechnology}, author={Kalb, Julian and Weller, Fabian and Irmler, Lukas and Knittel, Vanessa and Graus, Philipp and Boneberg, Johannes and Schmidt-Mende, Lukas}, note={Article Number: 335302} }

Schmidt-Mende, Lukas Irmler, Lukas Position-controlled laser-induced creation of rutile TiO<sub>2</sub> nanostructures Knittel, Vanessa 2019-06-13T09:44:27Z Kalb, Julian Boneberg, Johannes Schmidt-Mende, Lukas Graus, Philipp 2019-06-13T09:44:27Z Knittel, Vanessa Irmler, Lukas Weller, Fabian Boneberg, Johannes Weller, Fabian Kalb, Julian For potential applications of nanostructures, control over their position is important. In this report, we introduce two continuous wave laser-based lithography techniques which allow texturing thin TiO<sub>2</sub> films to create a fine rutile TiO<sub>2</sub> structure on silicon via spatially confined oxidation or a solid-liquid-solid phase transition, for initial layers, we use titanium and anatase TiO<sub>2</sub>, respectively. A frequency-doubled Nd:YAG laser at a wavelength of 532 nm is employed for the lithography process and the samples are characterized with scanning electron microscopy. The local orientation of the created rutile crystals is determined by the spatial orientation of hydrothermally grown rutile TiO<sub>2</sub> nanorods. Depending on the technique, we obtain either randomly aligned or highly ordered nanorod ensembles. An additional chemically inert SiO<sub>2</sub> cover layer suppresses the chemical and electronic surface properties of TiO<sub>2</sub> and is removed locally with the laser treatment. Hence, the resulting texture provides a specific topography and crystal structure as well as a high contrast of surface properties on a nanoscale, including the position-controlled growth of TiO<sub>2</sub> nanorods. eng Graus, Philipp 2019-08-16

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