Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures
| Type of Publication: | Journal article |
| Publication status: | Published |
| URI (citable link): | http://nbn-resolving.de/urn:nbn:de:bsz:352-2-1vq6ngc6esig54 |
| Author: | Stöffler, Dominik; Hoffmann-Vogel, Regina |
| Year of publication: | 2015 |
| Published in: | Journal of Vacuum Science & Technology B : Nanotechnology and Microelectronics : Materials, Processing, Measurement, and Phenomena ; 33 (2015), 1. - 013201. - ISSN 2166-2746. - eISSN 2166-2754 |
| DOI (citable link): | https://dx.doi.org/10.1116/1.4905092 |
| Summary: |
The authors present the design of a modular sample holder that offers the possibility of in situ fabrication of metallic nanostructures under ultrahigh vacuum. One of the crucial points is to bridge the gap between the macroscopic leads and the nanostructure itself. This problem is solved by using a set of two different masks. For a precise alignment of the two masks, a magnetic tripod connection system has been developed. With this new system, an alignment precision of 26 lm is obtained. As a result of the fabrication in ultrahigh vacuum, the nanostructures will be accessible to scanning probe techniques without surface contamination. First results show that electrical measurements are indeed possible.
|
| Subject (DDC): | 530 Physics |
| Link to License: | Terms of use |
| Bibliography of Konstanz: | Yes |
| Refereed: | Yes |
Cite This
Files in this item
![[PDF]](/themes/Kops/images/mimes/pdf.png "PDF file"){kind=small}
STÖFFLER, Dominik, Regina HOFFMANN-VOGEL, 2015. Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures. In: Journal of Vacuum Science & Technology B : Nanotechnology and Microelectronics : Materials, Processing, Measurement, and Phenomena. 33(1), 013201. ISSN 2166-2746. eISSN 2166-2754. Available under: doi: 10.1116/1.4905092
@article{Stoffler2015-01Enhan-45303, title={Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures}, year={2015}, doi={10.1116/1.4905092}, number={1}, volume={33}, issn={2166-2746}, journal={Journal of Vacuum Science & Technology B : Nanotechnology and Microelectronics : Materials, Processing, Measurement, and Phenomena}, author={Stöffler, Dominik and Hoffmann-Vogel, Regina}, note={Article Number: 013201} }
<rdf:RDF xmlns:dcterms="http://purl.org/dc/terms/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:bibo="http://purl.org/ontology/bibo/" xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#" xmlns:foaf="http://xmlns.com/foaf/0.1/" xmlns:void="http://rdfs.org/ns/void#" xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > <rdf:Description rdf:about="https://kops.uni-konstanz.de/rdf/resource/123456789/45303"> <dc:contributor>Stöffler, Dominik</dc:contributor> <dc:contributor>Hoffmann-Vogel, Regina</dc:contributor> <dc:language>eng</dc:language> <dc:creator>Hoffmann-Vogel, Regina</dc:creator> <bibo:uri rdf:resource="https://kops.uni-konstanz.de/handle/123456789/45303"/> <dcterms:issued>2015-01</dcterms:issued> <dcterms:hasPart rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/45303/3/Stoeffler_2-1vq6ngc6esig54.pdf"/> <dspace:hasBitstream rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/45303/3/Stoeffler_2-1vq6ngc6esig54.pdf"/> <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2019-03-05T12:56:38Z</dc:date> <dc:rights>terms-of-use</dc:rights> <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/rdf/resource/123456789/41"/> <dcterms:abstract xml:lang="eng">The authors present the design of a modular sample holder that offers the possibility of in situ fabrication of metallic nanostructures under ultrahigh vacuum. One of the crucial points is to bridge the gap between the macroscopic leads and the nanostructure itself. This problem is solved by using a set of two different masks. For a precise alignment of the two masks, a magnetic tripod connection system has been developed. With this new system, an alignment precision of 26 lm is obtained. As a result of the fabrication in ultrahigh vacuum, the nanostructures will be accessible to scanning probe techniques without surface contamination. First results show that electrical measurements are indeed possible.</dcterms:abstract> <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2019-03-05T12:56:38Z</dcterms:available> <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/rdf/resource/123456789/41"/> <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/> <foaf:homepage rdf:resource="http://localhost:8080/jspui"/> <dc:creator>Stöffler, Dominik</dc:creator> <dcterms:title>Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures</dcterms:title> <dcterms:rights rdf:resource="https://kops.uni-konstanz.de/page/termsofuse"/> </rdf:Description> </rdf:RDF>
Downloads since Mar 5, 2019 (Information about access statistics)
| Stoeffler_2-1vq6ngc6esig54.pdf | 25 |
This item appears in the following Collection(s)
Search KOPS
Browse
My Account
