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Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures

Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures

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STÖFFLER, Dominik, Regina HOFFMANN-VOGEL, 2015. Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures. In: Journal of Vacuum Science & Technology B : Nanotechnology and Microelectronics : Materials, Processing, Measurement, and Phenomena. 33(1), 013201. ISSN 2166-2746. eISSN 2166-2754. Available under: doi: 10.1116/1.4905092

@article{Stoffler2015-01Enhan-45303, title={Enhanced positioning precision and in situ macroscopic contacts for shadow-evaporated nanostructures}, year={2015}, doi={10.1116/1.4905092}, number={1}, volume={33}, issn={2166-2746}, journal={Journal of Vacuum Science & Technology B : Nanotechnology and Microelectronics : Materials, Processing, Measurement, and Phenomena}, author={Stöffler, Dominik and Hoffmann-Vogel, Regina}, note={Article Number: 013201} }

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