Stress control of tensile-strained In1−xGaxP nanomechanical string resonators

Vorschaubild
Dateien
Bueckle_2-cbe81v1vcju64.pdf
Bueckle_2-cbe81v1vcju64.pdfGröße: 1.2 MBDownloads: 443
Datum
2018
Autor:innen
Hauber, Valentin C.
Cole, Garrett D.
Gärtner, Claus
Zeimer, Ute
Grenzer, Jörg
Herausgeber:innen
Kontakt
ISSN der Zeitschrift
Electronic ISSN
ISBN
Bibliografische Daten
Verlag
Schriftenreihe
Auflagebezeichnung
URI (zitierfähiger Link)
http://nbn-resolving.de/urn:nbn:de:bsz:352-2-cbe81v1vcju64
DOI (zitierfähiger Link)
https://doi.org/10.1063/1.5054076
ArXiv-ID
http://arxiv.org/abs/1808.09773v2
Internationale Patentnummer
Link zur Lizenz
Urheberrechtlich geschützt
Angaben zur Forschungsförderung
European Union (EU): 732894
Projekt
H2020 FET PROACTIVE Hybrid Optomechanical Technologies (HOT)
Open Access-Veröffentlichung
Open Access Green
Sammlungen
Physik
Core Facility der Universität Konstanz
Gesperrt bis
Titel in einer weiteren Sprache
Publikationstyp
Zeitschriftenartikel
Publikationsstatus
Published
Erschienen in
Applied Physics Letters. 2018, 113(20), 201903. ISSN 0003-6951. eISSN 1077-3118. Available under: doi: 10.1063/1.5054076
Zusammenfassung

We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In1−xGaxP. The intrinsic strain arises during epitaxial growth as a consequence of the lattice mismatch between the thin film and the substrate, and is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a combination of anisotropic Young's modulus and a change of elastic properties caused by defects. As a function of the crystal orientation, a stress variation of up to 50% is observed. This enables fine tuning of the tensile stress for any given Ga content x, which implies interesting prospects for the study of high Q nanomechanical systems.

Zusammenfassung in einer weiteren Sprache
Fachgebiet (DDC)
530 Physik
Schlagwörter
Konferenz
Rezension
undefined / . - undefined, undefined
Forschungsvorhaben
Organisationseinheiten
Zeitschriftenheft
Datensätze
Zitieren
ISO 690BÜCKLE, Maximilian, Valentin C. HAUBER, Garrett D. COLE, Claus GÄRTNER, Ute ZEIMER, Jörg GRENZER, Eva M. WEIG, 2018. Stress control of tensile-strained In1−xGaxP nanomechanical string resonators. In: Applied Physics Letters. 2018, 113(20), 201903. ISSN 0003-6951. eISSN 1077-3118. Available under: doi: 10.1063/1.5054076
BibTex
@article{Buckle2018Stres-45131,
  year={2018},
  doi={10.1063/1.5054076},
  title={Stress control of tensile-strained In<sub>1−x</sub>Ga<sub>x</sub>P nanomechanical string resonators},
  number={20},
  volume={113},
  issn={0003-6951},
  journal={Applied Physics Letters},
  author={Bückle, Maximilian and Hauber, Valentin C. and Cole, Garrett D. and Gärtner, Claus and Zeimer, Ute and Grenzer, Jörg and Weig, Eva M.},
  note={Article Number: 201903}
}
RDF
<rdf:RDF
    xmlns:dcterms="http://purl.org/dc/terms/"
    xmlns:dc="http://purl.org/dc/elements/1.1/"
    xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
    xmlns:bibo="http://purl.org/ontology/bibo/"
    xmlns:dspace="http://digital-repositories.org/ontologies/dspace/0.1.0#"
    xmlns:foaf="http://xmlns.com/foaf/0.1/"
    xmlns:void="http://rdfs.org/ns/void#"
    xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > 
  <rdf:Description rdf:about="https://kops.uni-konstanz.de/server/rdf/resource/123456789/45131">
    <foaf:homepage rdf:resource="http://localhost:8080/"/>
    <dc:contributor>Bückle, Maximilian</dc:contributor>
    <dcterms:isPartOf rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dc:creator>Cole, Garrett D.</dc:creator>
    <dcterms:title>Stress control of tensile-strained In&lt;sub&gt;1−x&lt;/sub&gt;Ga&lt;sub&gt;x&lt;/sub&gt;P nanomechanical string resonators</dcterms:title>
    <dcterms:hasPart rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/45131/1/Bueckle_2-cbe81v1vcju64.pdf"/>
    <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2019-02-20T14:09:11Z</dc:date>
    <dc:creator>Gärtner, Claus</dc:creator>
    <dc:contributor>Cole, Garrett D.</dc:contributor>
    <bibo:uri rdf:resource="https://kops.uni-konstanz.de/handle/123456789/45131"/>
    <dc:rights>terms-of-use</dc:rights>
    <dc:creator>Hauber, Valentin C.</dc:creator>
    <dc:contributor>Zeimer, Ute</dc:contributor>
    <dspace:isPartOfCollection rdf:resource="https://kops.uni-konstanz.de/server/rdf/resource/123456789/41"/>
    <dcterms:rights rdf:resource="https://rightsstatements.org/page/InC/1.0/"/>
    <dc:contributor>Hauber, Valentin C.</dc:contributor>
    <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2019-02-20T14:09:11Z</dcterms:available>
    <dc:creator>Weig, Eva M.</dc:creator>
    <dc:contributor>Grenzer, Jörg</dc:contributor>
    <dc:creator>Zeimer, Ute</dc:creator>
    <dc:contributor>Weig, Eva M.</dc:contributor>
    <dcterms:abstract xml:lang="eng">We investigate the mechanical properties of freely suspended nanostrings fabricated from tensile-stressed, crystalline In&lt;sub&gt;1−x&lt;/sub&gt;Ga&lt;sub&gt;x&lt;/sub&gt;P. The intrinsic strain arises during epitaxial growth as a consequence of the lattice mismatch between the thin film and the substrate, and is confirmed by x-ray diffraction measurements. The flexural eigenfrequencies of the nanomechanical string resonators reveal an orientation dependent stress with a maximum value of 650 MPa. The angular dependence is explained by a combination of anisotropic Young's modulus and a change of elastic properties caused by defects. As a function of the crystal orientation, a stress variation of up to 50% is observed. This enables fine tuning of the tensile stress for any given Ga content x, which implies interesting prospects for the study of high Q nanomechanical systems.</dcterms:abstract>
    <dc:creator>Grenzer, Jörg</dc:creator>
    <dc:language>eng</dc:language>
    <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/>
    <dc:contributor>Gärtner, Claus</dc:contributor>
    <dspace:hasBitstream rdf:resource="https://kops.uni-konstanz.de/bitstream/123456789/45131/1/Bueckle_2-cbe81v1vcju64.pdf"/>
    <dcterms:issued>2018</dcterms:issued>
    <dc:creator>Bückle, Maximilian</dc:creator>
  </rdf:Description>
</rdf:RDF>
Interner Vermerk
xmlui.Submission.submit.DescribeStep.inputForms.label.kops_note_fromSubmitter
Kontakt
URL der Originalveröffentl.
Prüfdatum der URL
Prüfungsdatum der Dissertation
Finanzierungsart
Kommentar zur Publikation
Allianzlizenz
Corresponding Authors der Uni Konstanz vorhanden
Internationale Co-Autor:innen
Universitätsbibliographie
Ja
Begutachtet
Ja
Diese Publikation teilen