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Investigation of high gigahertz acoustic phonon lifetimes in thin silicon membranes

Investigation of high gigahertz acoustic phonon lifetimes in thin silicon membranes

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SCHUBERT, Martin, Martin GROSSMANN, Matthias KLINGELE, Oliver RISTOW, Mike HETTICH, Thomas DEKORSY, 2013. Investigation of high gigahertz acoustic phonon lifetimes in thin silicon membranes. 19th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC 2013). Berlin, Germany, Sep 25, 2013 - Sep 27, 2013. In: 2013 19th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC 2013) : Berlin, Germany, 25 - 27 September 2013. Piscataway, NJ:IEEE, pp. 13-15. ISBN 978-1-4799-2273-4

@inproceedings{Schubert2013Inves-42412, title={Investigation of high gigahertz acoustic phonon lifetimes in thin silicon membranes}, year={2013}, isbn={978-1-4799-2273-4}, address={Piscataway, NJ}, publisher={IEEE}, booktitle={2013 19th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC 2013) : Berlin, Germany, 25 - 27 September 2013}, pages={13--15}, author={Schubert, Martin and Grossmann, Martin and Klingele, Matthias and Ristow, Oliver and Hettich, Mike and Dekorsy, Thomas} }

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