KOPS - Das Institutionelle Repositorium der Universität Konstanz

Picosecond Photoacoustic Metrology of SiO<sub>2</sub> and LiNbO<sub>3</sub> Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters

Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters

Zitieren

Dateien zu dieser Ressource

Prüfsumme: MD5:abfebd091aa90b9396a5197d2858e31b

BRICK, Delia, Erkan EMRE, Martin GROSSMANN, Thomas DEKORSY, Mike HETTICH, 2017. Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters. In: Applied Sciences. 7(8), 822. eISSN 2076-3417. Available under: doi: 10.3390/app7080822

@article{Brick2017-08-10Picos-40417, title={Picosecond Photoacoustic Metrology of SiO2 and LiNbO3 Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters}, year={2017}, doi={10.3390/app7080822}, number={8}, volume={7}, journal={Applied Sciences}, author={Brick, Delia and Emre, Erkan and Grossmann, Martin and Dekorsy, Thomas and Hettich, Mike}, note={Article Number: 822} }

Brick, Delia Picosecond Photoacoustic Metrology of SiO<sub>2</sub> and LiNbO<sub>3</sub> Layer Systems Used for High Frequency Surface-Acoustic-Wave Filters Hettich, Mike Brick, Delia Dekorsy, Thomas Emre, Erkan 2017-10-25T11:58:44Z Grossmann, Martin Hettich, Mike Dekorsy, Thomas eng 2017-08-10 Emre, Erkan 2017-10-25T11:58:44Z Many applications of thin films necessitate detailed information about their thicknesses and sound velocities. Here, we study SiO<sub>2</sub>/LiNbO<sub>3 </sub>layer systems by picosecond photoacoustic metrology and measure the sound velocities of the respective layers and the film thickness of SiO<sub>2</sub>, which pose crucial information for the fabrication of surface-acoustic-wave filters for communication technology. Additionally, we utilize the birefringence and the accompanying change in the detection sensitivity of coherent acoustic phonons in the LiNbO<sub>3</sub> layer to infer information about the LiNbO<sub>3</sub> orientation and the layer interface. Grossmann, Martin

Dateiabrufe seit 25.10.2017 (Informationen über die Zugriffsstatistik)

Brick_2-1p3c4jifukz814.pdf 134

Das Dokument erscheint in:

KOPS Suche


Stöbern

Mein Benutzerkonto