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Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering

Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering

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GORGULLA, Angelika, Kay HAGEDORN, Giso HAHN, Barbara TERHEIDEN, 2015. Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering. 31st European Photovoltaic Solar Energy Conference and Exhibition. Hamburg, 14. Sep 2015 - 18. Sep 2015. In: 31st European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference held in Hamburg, Germany, 14 September - 18 September 2015. 31st European Photovoltaic Solar Energy Conference and Exhibition. Hamburg, 14. Sep 2015 - 18. Sep 2015. München:WIP, pp. 1310-1314. ISBN 3-936338-39-6. Available under: doi: 10.4229/EUPVSEC20152015-3DV.2.21

@inproceedings{Gorgulla2015Effec-34586, title={Effects of electrode distance and target angles on elemental concentrations and film properties of Al-doped ZnO films prepared by magnetron co-sputtering}, year={2015}, doi={10.4229/EUPVSEC20152015-3DV.2.21}, isbn={3-936338-39-6}, address={München}, publisher={WIP}, booktitle={31st European Photovoltaic Solar Energy Conference and Exhibition : proceedings of the international conference held in Hamburg, Germany, 14 September - 18 September 2015}, pages={1310--1314}, author={Gorgulla, Angelika and Hagedorn, Kay and Hahn, Giso and Terheiden, Barbara} }

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