Hydrogen kinetics in crystalline silicon : PECVD SiN studies in mc and Cz silicon

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HAHN, Giso, Axel SCHÖNECKER, Antonius R. BURGERS, Ravine GINIGE, Karim CHERKAOUI, Dieter KARG, 2005. Hydrogen kinetics in crystalline silicon : PECVD SiN studies in mc and Cz silicon. 20th European Photovoltaic Solar Energy Conference. Barcelona, 6. Jun 2005 - 10. Jun 2005. In: 20th European Photovoltaic Solar Energy Conference : proceedings of the international conference held in Barcelona, Spain, 6 - 10 June 2005. 20th European Photovoltaic Solar Energy Conference. Barcelona, 6. Jun 2005 - 10. Jun 2005. München:WIP Renewable Energies, pp. 717-720. ISBN 3-936338-19-1

@inproceedings{Hahn2005Hydro-31355, title={Hydrogen kinetics in crystalline silicon : PECVD SiN studies in mc and Cz silicon}, year={2005}, isbn={3-936338-19-1}, address={München}, publisher={WIP Renewable Energies}, booktitle={20th European Photovoltaic Solar Energy Conference : proceedings of the international conference held in Barcelona, Spain, 6 - 10 June 2005}, pages={717--720}, author={Hahn, Giso and Schönecker, Axel and Burgers, Antonius R. and Ginige, Ravine and Cherkaoui, Karim and Karg, Dieter} }

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