Formation of Ag/Al Screen-Printing Contacts on B Emitters

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2015
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IEEE Journal of Photovoltaics. 2015, 5(1), pp. 145-151. eISSN 2156-3381. Available under: doi: 10.1109/JPHOTOV.2014.2364117
Zusammenfassung

In this study, the contact formation process of Al containing Ag screen-printing pastes to BBr3-based B emitters on Si is investigated. Therefore, a detailed scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy study of top-view and cross-sectional samples was conducted. The possible influence of a SiN:H antireflection coating was considered by comparing contacts with and without a SiN:H layer. To analyze the role of the glass frit in the paste, the contact formation of pastes without glass was examined. The results indicate that the Ag/Al contact spots grow below the Si surface/SiN:H layer. The glass frit is only indispensable for etching the antireflection layer-it is not needed for melting the metal in the screen-printing paste. The realized experiments lead to a phenomenological model for the contact formation process of Al containing screen-printing pastes to boron emitters.

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Fachgebiet (DDC)
530 Physik
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Boron emitters, contact formation, metallization, p+Si, scanning electron microscopy (SEM), screen-printing
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Zitieren
ISO 690FRITZ, Susanne, Markus KÖNIG, Stefanie EBERT, Axel HERGUTH, Matthias HÖRTEIS, Giso HAHN, 2015. Formation of Ag/Al Screen-Printing Contacts on B Emitters. In: IEEE Journal of Photovoltaics. 2015, 5(1), pp. 145-151. eISSN 2156-3381. Available under: doi: 10.1109/JPHOTOV.2014.2364117
BibTex
@article{Fritz2015Forma-30648,
  year={2015},
  doi={10.1109/JPHOTOV.2014.2364117},
  title={Formation of Ag/Al Screen-Printing Contacts on B Emitters},
  number={1},
  volume={5},
  journal={IEEE Journal of Photovoltaics},
  pages={145--151},
  author={Fritz, Susanne and König, Markus and Ebert, Stefanie and Herguth, Axel and Hörteis, Matthias and Hahn, Giso}
}
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