Formation of Ag/Al Screen-Printing Contacts on B Emitters

Type of Publication: Journal article
URI (citable link): http://nbn-resolving.de/urn:nbn:de:bsz:352-0-277548
Author: Fritz, Susanne; König, Markus; Riegel, Stefanie; Herguth, Axel; Hörteis, Matthias; Hahn, Giso
Year of publication: 2015
Published in: IEEE Journal of Photovoltaics ; 5 (2015), 1. - pp. 145-151. - eISSN 2156-3381
DOI (citable link): https://dx.doi.org/10.1109/JPHOTOV.2014.2364117
Summary:
In this study, the contact formation process of Al containing Ag screen-printing pastes to BBr3-based B emitters on Si is investigated. Therefore, a detailed scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy study of top-view and cross-sectional samples was conducted. The possible influence of a SiN∞:H antireflection coating was considered by comparing contacts with and without a SiN∞:H layer. To analyze the role of the glass frit in the paste, the contact formation of pastes without glass was examined. The results indicate that the Ag/Al contact spots grow below the Si surface/SiN∞:H layer. The glass frit is only indispensable for etching the antireflection layer-it is not needed for melting the metal in the screen-printing paste. The realized experiments lead to a phenomenological model for the contact formation process of Al containing screen-printing pastes to boron emitters.
Subject (DDC): 530 Physics
Keywords: Boron emitters, contact formation, metallization, p+Si, scanning electron microscopy (SEM), screen-printing
Link to License: In Copyright
Bibliography of Konstanz: Yes

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FRITZ, Susanne, Markus KÖNIG, Stefanie RIEGEL, Axel HERGUTH, Matthias HÖRTEIS, Giso HAHN, 2015. Formation of Ag/Al Screen-Printing Contacts on B Emitters. In: IEEE Journal of Photovoltaics. 5(1), pp. 145-151. eISSN 2156-3381. Available under: doi: 10.1109/JPHOTOV.2014.2364117

@article{Fritz2015Forma-30648, title={Formation of Ag/Al Screen-Printing Contacts on B Emitters}, year={2015}, doi={10.1109/JPHOTOV.2014.2364117}, number={1}, volume={5}, journal={IEEE Journal of Photovoltaics}, pages={145--151}, author={Fritz, Susanne and König, Markus and Riegel, Stefanie and Herguth, Axel and Hörteis, Matthias and Hahn, Giso} }

Fritz, Susanne König, Markus Hahn, Giso Herguth, Axel 2015 terms-of-use König, Markus 2015-04-02T08:50:44Z Hahn, Giso Herguth, Axel Hörteis, Matthias Hörteis, Matthias Fritz, Susanne eng 2015-04-02T08:50:44Z In this study, the contact formation process of Al containing Ag screen-printing pastes to BBr3-based B emitters on Si is investigated. Therefore, a detailed scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy study of top-view and cross-sectional samples was conducted. The possible influence of a SiN<sub>∞</sub>:H antireflection coating was considered by comparing contacts with and without a SiN<sub>∞</sub>:H layer. To analyze the role of the glass frit in the paste, the contact formation of pastes without glass was examined. The results indicate that the Ag/Al contact spots grow below the Si surface/SiN<sub>∞</sub>:H layer. The glass frit is only indispensable for etching the antireflection layer-it is not needed for melting the metal in the screen-printing paste. The realized experiments lead to a phenomenological model for the contact formation process of Al containing screen-printing pastes to boron emitters. Formation of Ag/Al Screen-Printing Contacts on B Emitters Riegel, Stefanie Riegel, Stefanie

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