@article{Schiele2014Etchb-30602,
  year={2014},
  doi={10.1016/j.egypro.2014.08.086},
  title={Etch-back of p<sup>+</sup> structures for selective boron emitters in n-type c-Si solar cells},
  volume={55},
  journal={Energy Procedia},
  pages={295--301},
  author={Schiele, Yvonne and Joos, Sebastian and Hahn, Giso and Terheiden, Barbara}
}

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