Nanostructured silicon for studying fundamental aspects of nanomechanics


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BLICK, Robert H., Artur ERBE, Laura PESCINI, Andreas KRAUS, Dominik V. SCHEIBLE, Florian W. BEIL, Eva HÖHBERGER, Andreas HÖRNER, Jochen KIRSCHBAUM, Heribert LORENZ, Jörg P. KOTTHAUS, 2002. Nanostructured silicon for studying fundamental aspects of nanomechanics. In: Journal of Physics: Condensed Matter. 14(34), pp. R905-R945. ISSN 0953-8984. eISSN 1361-648X

@article{Blick2002Nanos-25538, title={Nanostructured silicon for studying fundamental aspects of nanomechanics}, year={2002}, doi={10.1088/0953-8984/14/34/202}, number={34}, volume={14}, issn={0953-8984}, journal={Journal of Physics: Condensed Matter}, pages={R905--R945}, author={Blick, Robert H. and Erbe, Artur and Pescini, Laura and Kraus, Andreas and Scheible, Dominik V. and Beil, Florian W. and Höhberger, Eva and Hörner, Andreas and Kirschbaum, Jochen and Lorenz, Heribert and Kotthaus, Jörg P.} }

<rdf:RDF xmlns:rdf="" xmlns:bibo="" xmlns:dc="" xmlns:dcterms="" xmlns:xsd="" > <rdf:Description rdf:about=""> <dc:creator>Erbe, Artur</dc:creator> <dc:contributor>Lorenz, Heribert</dc:contributor> <dc:contributor>Höhberger, Eva</dc:contributor> <dcterms:available rdf:datatype="">2013-12-19T09:35:13Z</dcterms:available> <dc:creator>Kraus, Andreas</dc:creator> <dc:rights>deposit-license</dc:rights> <dc:creator>Höhberger, Eva</dc:creator> <dcterms:title>Nanostructured silicon for studying fundamental aspects of nanomechanics</dcterms:title> <dc:contributor>Kraus, Andreas</dc:contributor> <dc:contributor>Kirschbaum, Jochen</dc:contributor> <bibo:uri rdf:resource=""/> <dc:contributor>Pescini, Laura</dc:contributor> <dc:creator>Beil, Florian W.</dc:creator> <dc:creator>Blick, Robert H.</dc:creator> <dc:creator>Kotthaus, Jörg P.</dc:creator> <dcterms:rights rdf:resource=""/> <dc:contributor>Erbe, Artur</dc:contributor> <dc:creator>Kirschbaum, Jochen</dc:creator> <dc:creator>Scheible, Dominik V.</dc:creator> <dc:creator>Hörner, Andreas</dc:creator> <dc:creator>Pescini, Laura</dc:creator> <dc:contributor>Kotthaus, Jörg P.</dc:contributor> <dc:date rdf:datatype="">2013-12-19T09:35:13Z</dc:date> <dc:contributor>Blick, Robert H.</dc:contributor> <dcterms:bibliographicCitation>Journal of physics : Condensed matter ; 14 (2002), 34. - R905-R945</dcterms:bibliographicCitation> <dcterms:issued>2002</dcterms:issued> <dc:creator>Lorenz, Heribert</dc:creator> <dc:contributor>Hörner, Andreas</dc:contributor> <dc:language>eng</dc:language> <dc:contributor>Scheible, Dominik V.</dc:contributor> <dcterms:abstract xml:lang="eng">Nanomechanics features three-dimensional nanostructuring, which allows full exploitation of the mechanical degree of freedom on the nanometre scale. In this work a number of exemplifying experiments on nano-electromechanical systems realized in silicon materials will be presented. First an introduction to the underlying mechanics will be given and finite element methods required for simulations will be discussed. Further topics presented include measurement methods for probing the mechanical properties of free standing nanowires, sensor applications and nonlinear properties of nanomechanical resonators. Other applications such as parametric frequency tuning are demonstrated and the major sources of dissipation are discussed. Finally, an outlook over the fundamental limits of nanoresonators is given.</dcterms:abstract> <dc:contributor>Beil, Florian W.</dc:contributor> </rdf:Description> </rdf:RDF>

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