A Study of Parylene C Polymer Deposition Inside Microscale Gaps


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RAMACHANDRAN, Anup, Michael JUNK, Klaus-Peter KOCH, Klaus-Peter HOFFMANN, 2007. A Study of Parylene C Polymer Deposition Inside Microscale Gaps. In: IEEE Transactions on Advanced Packaging. 30(4), pp. 712-724. ISSN 1521-3323. eISSN 1557-9980

@article{Ramachandran2007Study-25396, title={A Study of Parylene C Polymer Deposition Inside Microscale Gaps}, year={2007}, doi={10.1109/TADVP.2007.901662}, number={4}, volume={30}, issn={1521-3323}, journal={IEEE Transactions on Advanced Packaging}, pages={712--724}, author={Ramachandran, Anup and Junk, Michael and Koch, Klaus-Peter and Hoffmann, Klaus-Peter} }

<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:bibo="http://purl.org/ontology/bibo/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:dcterms="http://purl.org/dc/terms/" xmlns:xsd="http://www.w3.org/2001/XMLSchema#" > <rdf:Description rdf:about="https://kops.uni-konstanz.de/rdf/resource/123456789/25396"> <dc:date rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2013-12-19T17:32:50Z</dc:date> <dc:rights>deposit-license</dc:rights> <dc:creator>Junk, Michael</dc:creator> <dc:contributor>Ramachandran, Anup</dc:contributor> <dc:contributor>Koch, Klaus-Peter</dc:contributor> <dcterms:rights rdf:resource="http://nbn-resolving.org/urn:nbn:de:bsz:352-20140905103605204-4002607-1"/> <dc:creator>Hoffmann, Klaus-Peter</dc:creator> <dc:creator>Koch, Klaus-Peter</dc:creator> <dcterms:issued>2007</dcterms:issued> <dcterms:bibliographicCitation>IEEE transactions on advanced packaging ; 30 (2007), 4. - S. 712-724</dcterms:bibliographicCitation> <dc:contributor>Junk, Michael</dc:contributor> <dcterms:abstract xml:lang="eng">Parylene C is a biocompatible polymer that has been investigated as an encapsulation material for implantable microsystems. Since parylene C is deposited directly on the substrate from the vapor phase it can conform to a wide range of geometries. However, the thickness of the deposited layer tends to decrease in microscale gaps, which might lead to an insulation failure. To ensure more robustness of the coating, the changes in parylene C coating thickness have been investigated experimentally using simple gaps of known dimensions. In an attempt to better understand these experimental findings, two theoretical models have been developed. The first one, which is based on a diffusion approximation, is able to reproduce and extrapolate the experimental results, leading to a useful design rule for practical applications involving parylene C coating. As an example, we present the substrate design of a flexible sieve electrode for a peripheral nerve interface. The second model aims at an appropriate microscopic description of the coating process in terms of kinetic theory of gases.</dcterms:abstract> <dcterms:available rdf:datatype="http://www.w3.org/2001/XMLSchema#dateTime">2013-12-19T17:32:50Z</dcterms:available> <dc:creator>Ramachandran, Anup</dc:creator> <dc:language>eng</dc:language> <bibo:uri rdf:resource="http://kops.uni-konstanz.de/handle/123456789/25396"/> <dcterms:title>A Study of Parylene C Polymer Deposition Inside Microscale Gaps</dcterms:title> <dc:contributor>Hoffmann, Klaus-Peter</dc:contributor> </rdf:Description> </rdf:RDF>

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