Measurement of net dopant concentration via dynamic photoluminescence

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GIESECKE, Johannes, Martin SCHUBERT, Wilhelm WARTA, 2012. Measurement of net dopant concentration via dynamic photoluminescence. In: Journal of Applied Physics. 112(6), pp. 063704. ISSN 0021-8979. eISSN 1089-7550. Available under: doi: 10.1063/1.4752722

@article{Giesecke2012Measu-25082, title={Measurement of net dopant concentration via dynamic photoluminescence}, year={2012}, doi={10.1063/1.4752722}, number={6}, volume={112}, issn={0021-8979}, journal={Journal of Applied Physics}, author={Giesecke, Johannes and Schubert, Martin and Warta, Wilhelm}, note={Article Number: 063704} }

<rdf:RDF xmlns:dcterms="" xmlns:dc="" xmlns:rdf="" xmlns:bibo="" xmlns:dspace="" xmlns:foaf="" xmlns:void="" xmlns:xsd="" > <rdf:Description rdf:about=""> <dc:creator>Schubert, Martin</dc:creator> <dc:date rdf:datatype="">2013-11-06T21:04:58Z</dc:date> <bibo:uri rdf:resource=""/> <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/> <dcterms:bibliographicCitation>Journal of Applied Physics ; 112 (2012), 6. - 063704</dcterms:bibliographicCitation> <dcterms:abstract xml:lang="eng">This paper presents a class of methods to determine net dopant concentration of silicon wafers by means of dynamic or quasi-steady-state photoluminescence. In contrast to resistivity measurements, this approach is independent of assumptions about dopant type and majority carrier mobility. The latter fact makes it particularly interesting for the determination of net dopant concentration in compensated silicon, where conventional mobility models involving only one dopant species have been reported to fail. Our approach also allows access to majority carrier mobility via combination of net dopant concentration as inferred from photoluminescence with a resistivity measurement.</dcterms:abstract> <foaf:homepage rdf:resource="http://localhost:8080/jspui"/> <dcterms:issued>2012</dcterms:issued> <dc:language>eng</dc:language> <dcterms:isPartOf rdf:resource=""/> <dc:contributor>Warta, Wilhelm</dc:contributor> <dc:creator>Giesecke, Johannes</dc:creator> <dc:rights>terms-of-use</dc:rights> <dcterms:title>Measurement of net dopant concentration via dynamic photoluminescence</dcterms:title> <dc:creator>Warta, Wilhelm</dc:creator> <dspace:isPartOfCollection rdf:resource=""/> <dc:contributor>Schubert, Martin</dc:contributor> <dc:contributor>Giesecke, Johannes</dc:contributor> <dcterms:available rdf:datatype="">2013-11-06T21:04:58Z</dcterms:available> <dcterms:rights rdf:resource=""/> </rdf:Description> </rdf:RDF>

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