Transition metal precipitates in mc Si : a new detection method using 3D-FIB


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ZUSCHLAG, Annika, Michail SCHWAB, Dorit MERHOF, Giso HAHN, 2013. Transition metal precipitates in mc Si : a new detection method using 3D-FIB. In: Solid State Phenomena. 205-206, pp. 136-141. ISSN 0377-6883. eISSN 1662-9779. Available under: doi: 10.4028/

@article{Zuschlag2013Trans-25059, title={Transition metal precipitates in mc Si : a new detection method using 3D-FIB}, year={2013}, doi={10.4028/}, volume={205-206}, issn={0377-6883}, journal={Solid State Phenomena}, pages={136--141}, author={Zuschlag, Annika and Schwab, Michail and Merhof, Dorit and Hahn, Giso} }

<rdf:RDF xmlns:dcterms="" xmlns:dc="" xmlns:rdf="" xmlns:bibo="" xmlns:dspace="" xmlns:foaf="" xmlns:void="" xmlns:xsd="" > <rdf:Description rdf:about=""> <dcterms:hasPart rdf:resource=""/> <dcterms:available rdf:datatype="">2013-11-06T20:34:25Z</dcterms:available> <dc:rights>terms-of-use</dc:rights> <dc:contributor>Schwab, Michail</dc:contributor> <dc:contributor>Zuschlag, Annika</dc:contributor> <dcterms:rights rdf:resource=""/> <dc:creator>Schwab, Michail</dc:creator> <dc:language>eng</dc:language> <bibo:uri rdf:resource=""/> <dc:creator>Zuschlag, Annika</dc:creator> <dcterms:isPartOf rdf:resource=""/> <dcterms:issued>2013</dcterms:issued> <dc:contributor>Merhof, Dorit</dc:contributor> <dcterms:abstract xml:lang="eng">To investigate transition metal precipitates in Si, synchrotron based measurements, like micro x-ray fluorescence (μXRF) or detailed transmission electron microscopy (TEM) studies, are usually necessary. Transition metals are among the most detrimental defects in multi-crystalline (mc) silicon material for solar cell applications, due to their impact on minority charge carrier lifetime and possible shunt formation. We present another possibility to investigate transition metal precipitates by 3-dimensional focused ion beam (3D-FIB) cutting using a combined scanning electron microscope (SEM) SEM-FIB-system. This method is able to detect transition metal precipitates down to 5 nm in radius and provides additional information about the 3D shape, size and spatial distribution of the precipitates.</dcterms:abstract> <dcterms:title>Transition metal precipitates in mc Si : a new detection method using 3D-FIB</dcterms:title> <dspace:hasBitstream rdf:resource=""/> <foaf:homepage rdf:resource="http://localhost:8080/jspui"/> <void:sparqlEndpoint rdf:resource="http://localhost/fuseki/dspace/sparql"/> <dc:contributor>Hahn, Giso</dc:contributor> <dc:creator>Hahn, Giso</dc:creator> <dcterms:bibliographicCitation>Solid State Phenomena ; (2013), 205-206. - S. 136-141</dcterms:bibliographicCitation> <dc:date rdf:datatype="">2013-11-06T20:34:25Z</dc:date> <dspace:isPartOfCollection rdf:resource=""/> <dc:creator>Merhof, Dorit</dc:creator> </rdf:Description> </rdf:RDF>

Dateiabrufe seit 01.10.2014 (Informationen über die Zugriffsstatistik)

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