Nickel : A very fast diffuser in silicon

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LINDROOS, Jeanette, David P. FENNING, Daniel J. BACKLUND, Erik VERLAGE, Angelika GORGULLA, Stefan K. ESTREICHER, Hele SAVIN, Tonio BUONASSISI, 2013. Nickel : A very fast diffuser in silicon. In: Journal of Applied Physics. 113(20), 204906. ISSN 0021-8979. eISSN 1089-7550. Available under: doi: 10.1063/1.4807799

@article{Lindroos2013Nicke-25036, title={Nickel : A very fast diffuser in silicon}, year={2013}, doi={10.1063/1.4807799}, number={20}, volume={113}, issn={0021-8979}, journal={Journal of Applied Physics}, author={Lindroos, Jeanette and Fenning, David P. and Backlund, Daniel J. and Verlage, Erik and Gorgulla, Angelika and Estreicher, Stefan K. and Savin, Hele and Buonassisi, Tonio}, note={Article Number: 204906} }

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